Abstract
The phase-space measurement of micro-optical objects with submillimeter dimensions is reported for the first time to our knowledge. The experimental data were compared with simulated results from interferometric measurements and were found to be in good agreement.
© 1999 Optical Society of America
Full Article | PDF ArticleMore Like This
Jürgen H. Massig
Appl. Opt. 38(19) 4103-4105 (1999)
Róbert Klug and Karl-Heinz Brenner
Appl. Opt. 38(34) 7002-7008 (1999)
Hong Zhang, Michael J. Lalor, and David R. Burton
Appl. Opt. 38(16) 3534-3541 (1999)