OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 25 — Sep. 1, 1999
  • pp: 5388–5398

Error analysis of null ellipsometry with depolarization

Soe-Mie F. Nee  »View Author Affiliations


Applied Optics, Vol. 38, Issue 25, pp. 5388-5398 (1999)
http://dx.doi.org/10.1364/AO.38.005388


View Full Text Article

Enhanced HTML    Acrobat PDF (185 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Null ellipsometry is analyzed for components with depolarizations for unpolarized incident light. Serious imperfections include sample depolarization D < 0.2, misalignment (δC < 2°) and off-quarter-wave retardance (δτ < 5°) of the compensator. The four-zone null positions are derived analytically to the second order of serious imperfections and are also simulated based on Mueller matrices with depolarization. Errors of all four-zone nulls increase with increasing D. Depolarizations of all components except the analyzer cause errors to the nulls. The errors associated with D always couple with the second order of δC and δτ and are enhanced by csc2 2ψ. These divergent errors limit the applicable region of null ellipsometry where the errors in ψ and Δ are within 0.1°, and the simulation agrees well with the analytic solutions.

© 1999 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(240.0240) Optics at surfaces : Optics at surfaces
(260.5430) Physical optics : Polarization

History
Original Manuscript: March 29, 1999
Revised Manuscript: June 14, 1999
Published: September 1, 1999

Citation
Soe-Mie F. Nee, "Error analysis of null ellipsometry with depolarization," Appl. Opt. 38, 5388-5398 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-25-5388


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. S.-M. F. Nee, “The effects of incoherent scattering on ellipsometry,” in Polarization Analysis and Measurement, D. H. Goldstein, R. A. Chipman, eds., Proc. SPIE1746, 119–127 (1992). [CrossRef]
  2. S.-M. F. Nee, “Effects of near-specular scattering on polarimetry,” in Polarization Analysis and Measurement II, D. H. Goldstein, D. B. Chenault, eds., Proc. SPIE2265, 304–313 (1994). [CrossRef]
  3. S.-M. F. Nee, “Polarization of specular reflection and near-specular scattering by a rough surface,” Appl. Opt. 35, 3570–3582 (1996). [CrossRef]
  4. S.-M. F. Nee, “Birefringence characterization using transmission ellipsometry,” in Polarization Analysis and Measurement, D. H. Goldstein, R. A. Chipman, eds., Proc. SPIE1746, 269–280 (1992). [CrossRef]
  5. R. M. A. Azzam, N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1977), Sections 2.12, 3.8, and Appendix.
  6. R. M. A. Azzam, N. M. Bashara, “Ellipsometry with imperfect components including incoherent effects,” J. Opt. Soc. Am. 61, 1380–1391 (1971). [CrossRef]
  7. H. C. van de Hulst, Light Scattering by Small Particles (Wiley, New York, 1957).
  8. S.-M. F. Nee, “Polarization measurement,” in The Measurement, Instrumentation and Sensors Handbook, J. G. Webster, ed. (CRC, Boca Raton, Fla., 1999), Chap. 60. [CrossRef]
  9. S. F. Nee, C. Yoo, T. Cole, D. Burge, “Characterization of imperfect polarizers under imperfect conditions,” Appl. Opt. 37, 57–64 (1998). [CrossRef]
  10. G. E. Jellison, D. H. Lowndes, “Time resolved ellipsometry,” Appl. Opt. 24, 2948–2955 (1985). [CrossRef]
  11. A. B. Kostinski, “Depolarization criterion for incoherent scattering,” Appl. Opt. 31, 3506–3508 (1992). [CrossRef] [PubMed]
  12. R. A. Chipman, “Polarimetry,” in Handbook of Optics (McGraw-Hill, New York, 1995), Vol. II, Chap. 22.
  13. U. Rossow, “Depolarization/mixed polarization corrections of ellipsometry spectra,” Thin Solid Films 313–314, 97–101 (1998). [CrossRef]
  14. J. Th. Zettler, Th. Trepk, L. Spanos, Y. Z. Hu, W. Richter, “High precision UV-visible-near-IR Stokes vector spectroscopy,” Thin Solid Films 234, 402–407 (1993). [CrossRef]
  15. M. W. Williams, “Depolarization and cross polarization in ellipsometry of rough surfaces,” Appl. Opt. 25, 3616–3622 (1986). [CrossRef] [PubMed]
  16. S.-M. F. Nee, T. Cole, C. Yoo, D. Burge, “Characterization of infrared polarizers,” in Conference of Polarization: Measurement, Analysis, and Remote Sensing, D. H. Goldstein, D. B. Chenault, eds., Proc. SPIE3121, 213–224 (1997).
  17. S.-M. F. Nee, T. W. Nee, “Polarization of scattering by rough surfaces,” in Scattering and Surface Roughness II, Z.-H. Gu, A. A. Maradudin, eds., Proc. SPIE3426, 169–180 (1998). [CrossRef]
  18. S.-M. F. Nee, T. Cole, “Effects of depolarization of optical components on null ellipsometry,” Thin Solid Films 313–314, 90–96 (1998). [CrossRef]
  19. S. F. Nee, J. M. Bennett, P. C. Archibald, “Reflection, scattering and polarization from very rough surfaces,” in Optical Scattering: Applications, Measurement, and Theory II, J. C. Stover, ed., Proc. SPIE1995, 202–212 (1993).
  20. G. E. Jellison, J. W. McCamy, “Sample depolarization effects from thin films of ZnS on GaAs as measured by spectroscopic ellipsometry,” Appl. Phys. Lett. 61, 512–514 (1992). [CrossRef]
  21. A. Röseler, “Problem of polarization degree in spectroscopic photometric ellipsometry (polarimetry),” J. Opt. Soc. Am. 9, 1124–1131 (1992). [CrossRef]
  22. D. A. Ramsey, K. C. Ludema, “The influences of roughness on film thickness measurements by Mueller matrix ellipsometry,” Rev. Sci. Instrum. 65, 2874–2881 (1994). [CrossRef]
  23. R. Joerger, K. Forcht, A. Gombert, M. Köhl, W. Graf, “Influence of incoherent superposition of light on ellipsometric coefficients,” Appl. Opt. 36, 319–327 (1997). [CrossRef] [PubMed]
  24. M. Kildemo, P. Bulkin, B. Drevillon, O. Hunderi, “Real-time control by multiwavelength ellipsometry of plasma-deposited multilayers on glass by use of an incoherent-reflection model,” Appl. Opt. 36, 6352–6359 (1997). [CrossRef]
  25. U. Richter, “Application of the degree of polarization to film thickness gradients,” Thin Solid Films 313–314, 102–107 (1998). [CrossRef]
  26. M. Kildemo, R. Ossikovski, M. Stchakovsky, “Measurement of the absorption edge of thick transparent substrates using the incoherent reflection model and spectroscopic UV-visible-near IR ellipsometry,” Thin Solid Films 313–314, 108–113 (1998). [CrossRef]
  27. G. E. Jellison, “Spectroscopic ellipsometry data analysis: measured versus calculated quantities,” Thin Solid Films 313–314, 33–39 (1998). [CrossRef]
  28. S.-M. F. Nee, “Error reduction for a serious compensator imperfection for null ellipsometry,” J. Opt. Soc. Am. A 8, 314–321 (1991). [CrossRef]
  29. G. R. Fowles, Introduction to Modern Optics (Holt, Rinehart & Winston, New York, 1975), Chap. 6.
  30. S. F. Nee, J. R. Jokipii, “Interstellar polarization in an irregularly fluctuating medium,” Astrophys. J. 234, 140–153 (1979). [CrossRef]
  31. S. F. Nee, “Fluctuation theory of starlight polarization,” Astrophys. J. 237, 471–481 (1980). [CrossRef]
  32. S. F. Nee, H. E. Bennett, “A simple high precision extinction method for measuring refractive index of transparent materials,” in Laser-Induced Damage in Optical Materials: 1990, H. E. Bennett, L. L. Chase, A. H. Guenther, B. E. Newnam, M. J. Soileau, eds., Proc. SPIE1441, 31–37 (1990).
  33. S. F. Nee, H. E. Bennett, “Accurate null polarimetry for measuring the refractive index of transparent materials,” J. Opt. Soc. Am. A 10, 2076–2083 (1993). [CrossRef]

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited