OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 38, Iss. 25 — Sep. 1, 1999
  • pp: 5447–5451

Variation of band-edge position with errors in the monitoring of layer termination level for long- and short-wave pass filters

Ronald R. Willey and David E. Machado  »View Author Affiliations


Applied Optics, Vol. 38, Issue 25, pp. 5447-5451 (1999)
http://dx.doi.org/10.1364/AO.38.005447


View Full Text Article

Enhanced HTML    Acrobat PDF (115 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Optical monitoring of periodic thin-film stacks by the termination of each layer at the same constant photometric level has certain advantages. One of these principal advantages is the error compensation effect in the vicinity of the monitoring wavelength. In this study, we examine, by simulation, the effect of an error in the knowledge of the absolute value of the photometric termination level on the probable stability in the manufacture of the edge position of a blocked band. The results include equations that allow the determination of the appropriate values of parameters associated with the optimum termination levels to minimize the effects of such errors.

© 1999 Optical Society of America

OCIS Codes
(310.0310) Thin films : Thin films
(310.1860) Thin films : Deposition and fabrication

History
Original Manuscript: February 26, 1999
Revised Manuscript: May 17, 1999
Published: September 1, 1999

Citation
Ronald R. Willey and David E. Machado, "Variation of band-edge position with errors in the monitoring of layer termination level for long- and short-wave pass filters," Appl. Opt. 38, 5447-5451 (1999)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-38-25-5447


Sort:  Author  |  Year  |  Journal  |  Reset  

References

  1. W. P. Thoeni, “Deposition of optical coatings: process control and automation,” Thin Solid Films 88, 385–397 (1982). [CrossRef]
  2. H. A. Macleod, E. Pelletier, “Error compensation mechanisms in some thin-film monitoring systems,” Opt. Acta 24, 907–930 (1977). [CrossRef]
  3. F. Zhao, “Monitoring of periodic multilayer by the level method,” Appl. Opt. 24, 3339–3342 (1985). [CrossRef]
  4. R. R. Willey, “Monitoring and control of thin film growth,” in Practical Design and Production of Optical Thin Films (Marcel Dekker, New York, 1996).
  5. R. R. Willey, “Optical thickness monitoring sensitivity improvement using graphical methods,” Appl. Opt. 26, 729–737 (1987). [CrossRef] [PubMed]
  6. J. H. Apfel, “Graphics in optical coating design,” Appl. Opt. 11, 1303–1312 (1972). [CrossRef] [PubMed]
  7. S. R. Schmidt, R. G. Launsby, “Box-Behnken designs,” in Understanding Industrial Designed Experiments (Air Academy Press, Colorado Springs, Colo., 1994), Sect. 3.8.
  8. doe kiss, version 97 for Windows, Air Academy Associates (and Digital Computations, Inc.), 1155 Kelly Johnson Blvd., Colorado Springs, Colo. 80920 (1997).
  9. FilmStar Design, FTG Software Associates, P.O. Box 579, Princeton, N.J. 08542 (1998).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited