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Comparative study of the roughness of optical surfaces and thin films by use of x-ray scattering and atomic force microscopy

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Abstract

The surface roughness of polished glass substrates and optical thin-film coatings is studied with atomic force microscopy and x-ray scattering. It is demonstrated that both methods permit the determination of power spectral density functions in a wide range of spatial frequencies. The results are in good quantitative agreement.

© 1999 Optical Society of America

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