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Applied Optics

Applied Optics


  • Vol. 38, Iss. 7 — Mar. 1, 1999
  • pp: 1144–1152

Surface-roughness measurement based on the intensity correlation function of scattered light under speckle-pattern illumination

Peter Lehmann  »View Author Affiliations

Applied Optics, Vol. 38, Issue 7, pp. 1144-1152 (1999)

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The statistical properties of speckle patterns generated from a rough surface under a fully developed static speckle-pattern illumination are examined. The roughness dependence of the intensity autocorrelation function is studied and utilized to characterize typical engineering surfaces with anisotropic roughness. The speckle patterns under investigation are recorded by use of a CCD technique and are then analyzed by digital image processing algorithms to obtain a parameter that describes the surface roughness. It is shown that an in-process surface inspection can be achieved by this method.

© 1999 Optical Society of America

OCIS Codes
(120.6150) Instrumentation, measurement, and metrology : Speckle imaging
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(240.5770) Optics at surfaces : Roughness
(290.5880) Scattering : Scattering, rough surfaces

Original Manuscript: May 4, 1998
Revised Manuscript: September 9, 1998
Published: March 1, 1999

Peter Lehmann, "Surface-roughness measurement based on the intensity correlation function of scattered light under speckle-pattern illumination," Appl. Opt. 38, 1144-1152 (1999)

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