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Applied Optics

Applied Optics


  • Vol. 39, Iss. 10 — Apr. 1, 2000
  • pp: 1561–1569

Slope distribution of a rough surface measured by transmission scattering and polarization

Soe-Mie F. Nee, Randle V. Dewees, Tsu-Wei Nee, Linda F. Johnson, and Mark B. Moran  »View Author Affiliations

Applied Optics, Vol. 39, Issue 10, pp. 1561-1569 (2000)

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Transmission scattering from medium to air was used to measure the slope distribution of the rough plane surface of a transparent glass hemisphere. A facet model successfully explained the measured results of refraction, scattering, and polarization: Transmission scattering existed for incident angles greater than the critical angle, all measured curves for the normalized scattered intensity versus the facet slope angle for different detection directions overlapped, and the measured polarization of scattering was approximately constant for >99% of the facets. The slope distribution obtained by transmission scattering agrees with those of the surface profiles in the valid range of the profiler and can represent the slope distribution of the rough surface.

© 2000 Optical Society of America

OCIS Codes
(030.5770) Coherence and statistical optics : Roughness
(120.5710) Instrumentation, measurement, and metrology : Refraction
(120.5820) Instrumentation, measurement, and metrology : Scattering measurements
(260.5430) Physical optics : Polarization
(290.1990) Scattering : Diffusion
(290.5880) Scattering : Scattering, rough surfaces

Original Manuscript: June 25, 1999
Revised Manuscript: January 3, 2000
Published: April 1, 2000

Soe-Mie F. Nee, Randle V. Dewees, Tsu-Wei Nee, Linda F. Johnson, and Mark B. Moran, "Slope distribution of a rough surface measured by transmission scattering and polarization," Appl. Opt. 39, 1561-1569 (2000)

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