Interference Imaging for Aspheric Surface Testing
Applied Optics, Vol. 39, Issue 13, pp. 2122-2129 (2000)
http://dx.doi.org/10.1364/AO.39.002122
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Abstract
Peak–valley accuracy of λ/20 over a range of 2λ is not unusual in an interferometric null test. For the larger dynamic ranges of a nonnull test, however, the fringe-imaging optics degrades the accuracy. We classify the errors introduced and analyze them in the context of both general and third-order aberration theory. We can predict the measurement error from known interferometer parameters, and we illustrate this for a single mirror. The errors are tabulated for the specific case of a fourth-order asphere with 100 μm of sag. We show that the third-order approximation is comparable with exact ray-trace results for this case.
© 2000 Optical Society of America
[Optical Society of America ]
OCIS Codes
(110.0110) Imaging systems : Imaging systems
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4570) Instrumentation, measurement, and metrology : Optical design of instruments
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
Citation
Paul E. Murphy, Thomas G. Brown, and Duncan T. Moore, "Interference Imaging for Aspheric Surface Testing," Appl. Opt. 39, 2122-2129 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-13-2122
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