OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 13 — May. 1, 2000
  • pp: 2189–2197

Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity

Mandeep Singh and Joseph J. M. Braat  »View Author Affiliations


Applied Optics, Vol. 39, Issue 13, pp. 2189-2197 (2000)
http://dx.doi.org/10.1364/AO.39.002189


View Full Text Article

Enhanced HTML    Acrobat PDF (138 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We show numerically that the reflectivity of multilayer extreme-UV (EUV) mirrors tuned for the 11–14-nm spectral region, for which the two-component, Mo/Be and Mo/Si multilayer systems with constant layer thickness are commonly used, can be enhanced significantly when we incorporate additional materials within the stack. The reflectivity performance of the quarter-wavelength multilayers can be enhanced further by global optimization procedures with which the layer thicknesses are varied for optimum performance. By incorporating additional materials of differing complex refractive indices—e.g., Rh, Ru, Sr, Pd, and RbCl—in various regions of the stack, we observed peak reflectivity enhancements of as much as ∼5% for a single reflector compared with standard unoptimized stacks. We show that, in an EUV optical system with nine near-normal-incidence mirror surfaces, the optical throughput may be increased by a factor as great as 2. We also show that protective capping layers, in addition to protecting the mirrors from environmental attack, may serve to improve the reflectivity characteristics.

© 2000 Optical Society of America

OCIS Codes
(160.3900) Materials : Metals
(220.3740) Optical design and fabrication : Lithography
(230.1480) Optical devices : Bragg reflectors
(230.4170) Optical devices : Multilayers
(310.6860) Thin films : Thin films, optical properties
(340.7470) X-ray optics : X-ray mirrors

History
Original Manuscript: September 28, 1999
Revised Manuscript: January 19, 2000
Published: May 1, 2000

Citation
Mandeep Singh and Joseph J. M. Braat, "Design of multilayer extreme-ultraviolet mirrors for enhanced reflectivity," Appl. Opt. 39, 2189-2197 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-13-2189

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited