Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning
Applied Optics, Vol. 39, Issue 16, pp. 2605-2613 (2000)
http://dx.doi.org/10.1364/AO.39.002605
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Abstract
A confocal microscope profilometer, which incorporates chromatic depth scanning with a diffractive optical element and a digital micromirror device for configurable transverse scanning, provides three-dimensional (3D) quantitative measurements without mechanical translation of either the sample or the microscope. We used a microscope with various objective lenses (e.g., 40×, 60×, and 100×) to achieve different system characteristics. With a 100× objective, the microscope acquires stable measurements over a 320 μm × 240 μm surface area with a depth resolution of 0.39 μm at a 3-Hz scan rate. The total longitudinal field of view is 26.4 μm for a wavelength tuning range of 48.3 nm. The FWHM value of the longitudinal point-spread function is measured to be 0.99 μm. We present 3D measurements of a four-phase-level diffractive element and an integrated-circuit chip. The resolution and the accuracy are shown to be equivalent to those found with use of conventional mechanical scanning.
© 2000 Optical Society of America
OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(180.1790) Microscopy : Confocal microscopy
Citation
Sungdo Cha, Paul C. Lin, Lijun Zhu, Pang-Chen Sun, and Yeshaiahu Fainman, "Nontranslational three-dimensional profilometry by chromatic confocal microscopy with dynamically configurable micromirror scanning," Appl. Opt. 39, 2605-2613 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-16-2605
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