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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 16 — Jun. 1, 2000
  • pp: 2658–2663

Measurement of transparent plates with wavelength-tuned phase-shifting interferometry

Peter de Groot  »View Author Affiliations


Applied Optics, Vol. 39, Issue 16, pp. 2658-2663 (2000)
http://dx.doi.org/10.1364/AO.39.002658


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Abstract

A wavelength-tuned Fizeau interferometer is applied to the problem of flatness testing of transparent plates. When the plate is positioned at a specific distance from the reference surface and an integer-math 13-frame phase-shifting algorithm is applied, the system directly filters out unwanted interference arising from backsurface reflections. The resulting front-surface profile exhibits less than 2 nm of residual error attributable to spurious reflections from within the plate.

© 2000 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.4840) Optical design and fabrication : Testing

History
Original Manuscript: October 28, 1999
Revised Manuscript: February 16, 2000
Published: June 1, 2000

Citation
Peter de Groot, "Measurement of transparent plates with wavelength-tuned phase-shifting interferometry," Appl. Opt. 39, 2658-2663 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-16-2658

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