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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 16 — Jun. 1, 2000
  • pp: 2727–2732

Unified Analytical Inversion of Reflectometric and Ellipsometric Data of Absorbing Media

Georg Jakopic and Walter Papousek  »View Author Affiliations


Applied Optics, Vol. 39, Issue 16, pp. 2727-2732 (2000)
http://dx.doi.org/10.1364/AO.39.002727


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Abstract

We present a unified two-step analytical inversion of reflectometric and ellipsometric data of absorbing media. Instead of a direct determination of the optical constants n, κ from reflectometric or ellipsometric measurements, we first calculate the real and the imaginary part η, γ of the normal component of the wave vector in the absorbing medium. New and simple analytical formulas are obtained for η and γ in terms of ρs, ρp or tan ψ, δ, respectively, where ρs, ρp and tan ψ, δ are the measured reflectometric and ellipsometric parameters of the absorbing medium. The optical constants are then easily determined analytically again from η, γ. We use the new formulas to compare the sensitivity with experimental errors due to the inversion of reflectometric and ellipsometric data.

© 2000 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(160.4760) Materials : Optical properties
(240.0240) Optics at surfaces : Optics at surfaces
(240.6490) Optics at surfaces : Spectroscopy, surface
(260.2130) Physical optics : Ellipsometry and polarimetry

Citation
Georg Jakopic and Walter Papousek, "Unified Analytical Inversion of Reflectometric and Ellipsometric Data of Absorbing Media," Appl. Opt. 39, 2727-2732 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-16-2727


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References

  1. L. Ward, The Optical Constants of Bulk Materials and Films (Hilger, Bristol, UK, (1988), Secs. 2.6 and 2.8.
  2. J. Lekner, “Inversion of the s and p reflectances of absorbing media,” J. Opt. Soc. Am. A 14, 1355–1358 (1997).
  3. R. M. A. Azzam, “Grazing-incidence differential-reflectance method for explicit determination of the complex dielectric function of an isotropic absorbing medium,” Rev. Sci. Instrum. 54, 853–855 (1983).
  4. R. M. A. Azzam and N. M. Bashara, Ellipsometry and Polarized Light (North-Holland, Amsterdam, 1987).
  5. J. Lekner, Theory of Reflection (Nijhoff/Kluwer, Dordrecht, The Netherlands, 1987).
  6. S. P. M. Humphreys-Owen, “Comparison of reflection methods for measuring optical constants without polarimetric analysis, and proposal for new methods based on the Brewster angle,” Proc. Phys. Soc. London 77, 949–957 (1961).
  7. D. W. Berreman, “Simple relation between reflectances of polarized components of a beam when the angle of incidence is 45 degrees,” J. Opt. Soc. Am. 56, 1784 (1966).
  8. R. M. A. Azzam, “On the reflection of light at 45° angle of incidence,” Opt. Acta. 26, 113–115 (1979).
  9. E. D. Palik, ed., Handbook of Optical Constants of Solids (Academic, San Diego, Calif., 1985).

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