OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 16 — Jun. 1, 2000
  • pp: 2737–2739

Test of Opticlean Strip Coating Material For Removing Surface Contamination

Jean M. Bennett and Daniel Rönnow  »View Author Affiliations


Applied Optics, Vol. 39, Issue 16, pp. 2737-2739 (2000)
http://dx.doi.org/10.1364/AO.39.002737


View Full Text Article

Acrobat PDF (56 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

The strip coating material, Opticlean, which has been reformulated, has been shown to remove 1–5-μm-diameter particles as well as contamination remaining from previous drag wipe cleaning on a used silicon wafer. In addition, no residue that produced scattering was found on a fresh silicon wafer when Opticlean was applied and then stripped off. The total integrated scattering technique used for the measurements could measure scattering levels of He–Ne laser light as low as a few ppm (parts in 106), corresponding to a surface roughness of <1 Å rms.

© 2000 Optical Society of America

OCIS Codes
(160.4890) Materials : Organic materials
(240.6700) Optics at surfaces : Surfaces
(290.5820) Scattering : Scattering measurements
(290.5850) Scattering : Scattering, particles
(310.1620) Thin films : Interference coatings

Citation
Jean M. Bennett and Daniel Rönnow, "Test of Opticlean Strip Coating Material For Removing Surface Contamination," Appl. Opt. 39, 2737-2739 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-16-2737


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. J. M. Bennett, L. Mattsson, M. P. Keane, and L. Karlsson, “Test of strip coating materials for protecting optics,” Appl. Opt. 28, 1018–1026 (1989).
  2. J. M. Bennett and L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, Washington, D.C., 1999), pp. 29–33, 62–66.
  3. Dantronix Research and Technologies, 180 Bayley Avenue, Platteville, Wisc. 53818–3505; web site: http://www.opticlean.com.
  4. L. Mattsson, “Total integrated scatter measurement system for quality assessment of coatings on optical surfaces,” in Thin Film Technologies, J. R. Jacobsson, ed., Proc. SPIE 652, 264–271 (1986).
  5. American Society for Testing and Materials, “Standard Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering,” ASTM Doc. F-1048–87, (American Society for Testing and Materials, West Conshohocken, Pa., 1987); web site: http://www.astm.org.
  6. Ref. 2, p. 92.
  7. Ref. 2, pp. 7–9.
  8. Ref. 2, pp. 90–95.

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited