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Applied Optics

Applied Optics


  • Vol. 39, Iss. 16 — Jun. 1, 2000
  • pp: 2737–2739

Test of Opticlean strip coating material for removing surface contamination

Jean M. Bennett and Daniel Rönnow  »View Author Affiliations

Applied Optics, Vol. 39, Issue 16, pp. 2737-2739 (2000)

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The strip coating material, Opticlean, which has been reformulated, has been shown to remove 1–5-µm-diameter particles as well as contamination remaining from previous drag wipe cleaning on a used silicon wafer. In addition, no residue that produced scattering was found on a fresh silicon wafer when Opticlean was applied and then stripped off. The total integrated scattering technique used for the measurements could measure scattering levels of He–Ne laser light as low as a few ppm (parts in 106), corresponding to a surface roughness of <1 Å rms.

© 2000 Optical Society of America

OCIS Codes
(160.4890) Materials : Organic materials
(240.6700) Optics at surfaces : Surfaces
(290.5820) Scattering : Scattering measurements
(290.5850) Scattering : Scattering, particles
(310.1620) Thin films : Interference coatings

Original Manuscript: November 10, 1999
Revised Manuscript: March 10, 2000
Published: June 1, 2000

Jean M. Bennett and Daniel Rönnow, "Test of Opticlean strip coating material for removing surface contamination," Appl. Opt. 39, 2737-2739 (2000)

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  1. J. M. Bennett, L. Mattsson, M. P. Keane, L. Karlsson, “Test of strip coating materials for protecting optics,” Appl. Opt. 28, 1018–1026 (1989). [CrossRef] [PubMed]
  2. J. M. Bennett, L. Mattsson, Introduction to Surface Roughness and Scattering, 2nd ed. (Optical Society of America, Washington, D.C., 1999), pp. 29–33, 62–66.
  3. Dantronix Research and Technologies, 180 Bayley Avenue, Platteville, Wisc. 53818-3505; web site: http://www.opticlean.com .
  4. L. Mattsson, “Total integrated scatter measurement system for quality assessment of coatings on optical surfaces,” in Thin Film Technologies, J. R. Jacobsson, ed., Proc. SPIE652, 264–271 (1986). [CrossRef]
  5. American Society for Testing and Materials, “Standard Test Method for Measuring the Effective Surface Roughness of Optical Components by Total Integrated Scattering,” , (American Society for Testing and Materials, West Conshohocken, Pa., 1987); web site: http://www.astm.org .
  6. Ref. 2, p. 92.
  7. Ref. 2, pp. 7–9.
  8. Ref. 2, pp. 90–95.

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