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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 19 — Jul. 1, 2000
  • pp: 3187–3191

Electron-Beam-Fabricated Asymmetric Transmission Gratings for Microspectroscopy

Pasi Laakkonen, Markku Kuittinen, Janne Simonen, and Jari Turunen  »View Author Affiliations


Applied Optics, Vol. 39, Issue 19, pp. 3187-3191 (2000)
http://dx.doi.org/10.1364/AO.39.003187


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Abstract

Asymmetric transmission gratings operating in the resonance domain are designed by modeling of the dose-controlled electron-beam lithography process with Gaussian convolution. We aim to exceed some efficiency limit η<sub><i>s</i></sub> over a specified spectral range and to maximize η<sub><i>s</i></sub>. The resultant continuous-profile gratings are fabricated by electron-beam lithography and proportional reactive-ion etching into SiO<sub>2</sub>. We demonstrate gratings with good signal-to-noise ratio and a diffraction efficiency greater than 40% for wavelengths from 400 to 750 nm.

© 2000 Optical Society of America

OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(090.1970) Holography : Diffractive optics
(220.3740) Optical design and fabrication : Lithography

Citation
Pasi Laakkonen, Markku Kuittinen, Janne Simonen, and Jari Turunen, "Electron-Beam-Fabricated Asymmetric Transmission Gratings for Microspectroscopy," Appl. Opt. 39, 3187-3191 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-19-3187


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