Asymmetric transmission gratings operating in the resonance domain are designed by modeling of the dose-controlled electron-beam lithography process with Gaussian convolution. We aim to exceed some efficiency limit η<sub><i>s</i></sub> over a specified spectral range and to maximize η<sub><i>s</i></sub>. The resultant continuous-profile gratings are fabricated by electron-beam lithography and proportional reactive-ion etching into SiO<sub>2</sub>. We demonstrate gratings with good signal-to-noise ratio and a diffraction efficiency greater than 40% for wavelengths from 400 to 750 nm.
© 2000 Optical Society of America
Pasi Laakkonen, Markku Kuittinen, Janne Simonen, and Jari Turunen, "Electron-Beam-Fabricated Asymmetric Transmission Gratings for Microspectroscopy," Appl. Opt. 39, 3187-3191 (2000)