Abstract
An x-ray interferometer (XRI), which takes the lattice spacing of silicon as a length unit, can measure displacement with subnanometer resolution. A scanning probe microscope that combines an XRI and a scanning-tunnel microscope is designed to measure pitch. Experimental results have proved the feasibility of the design.
© 2000 Optical Society of America
Full Article | PDF ArticleMore Like This
Alexandre Titov, Igor Malinovsky, Hakima Belaïdi, Ricardo S. França, and Carlos A. Massone
Appl. Opt. 39(4) 526-538 (2000)
Nabeel A. Riza and Muzammil A. Arain
Appl. Opt. 42(13) 2341-2345 (2003)
Kaoru Minoshima and Hirokazu Matsumoto
Appl. Opt. 39(30) 5512-5517 (2000)