OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 39, Iss. 34 — Dec. 1, 2000
  • pp: 6421–6429

Measurement and Calibration of Interferometric Imaging Aberrations

Paul E. Murphy, Thomas G. Brown, and Duncan T. Moore  »View Author Affiliations


Applied Optics, Vol. 39, Issue 34, pp. 6421-6429 (2000)
http://dx.doi.org/10.1364/AO.39.006421


View Full Text Article

Acrobat PDF (484 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

Phase-shifting interferometry is the standard method for testing figure error on optical surfaces. Instruments measuring spheres and flats are readily available, but the accurate measurement of aspheres requires null correction. One problem with the general (nonull) testing of aspheres is the loss of common path. Systematic errors are introduced into the measurement by the fringe imaging optics. The sources and types of error are reviewed, as well as their effect on a wave-front measurement. These nonnull errors are predicted generally, with third-order analytic expressions derived for a tilted or a defocused test surface. An interferometer is built to test the expressions. The imaging system is a single lens, nominally image telecentric. Measurements are performed on a test surface defocused from −5 to 5 mm. The resulting measurement bias is shown to be in good agreement with third-order aberration theory predictions.

© 2000 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(220.1010) Optical design and fabrication : Aberrations (global)

Citation
Paul E. Murphy, Thomas G. Brown, and Duncan T. Moore, "Measurement and Calibration of Interferometric Imaging Aberrations," Appl. Opt. 39, 6421-6429 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-34-6421


Sort:  Author  |  Year  |  Journal  |  Reset

References

  1. Y.-Y. Cheng and J. C. Wyant, “Two-wavelength phase shifting interferometry,” Appl. Opt. 23, 4539–4543 (1984).
  2. J. E. Greivenkamp, “Sub-Nyquist interferometry,” Appl. Opt. 26, 5245–5258 (1987).
  3. R. J. Palum and J. E. Greivenkamp, “Sub-Nyquist interferometry: results and implementation issues,” in Laser Interferometry: Qualitative Analysis of Interferograms: Third in a Series, J. E. Wampler, ed., Proc. SPIE 1162, 378–388 (1989).
  4. J. E. Greivenkamp, A. E. Lowman, and R. J. Palum, “Sub-Nyquist interferometry: implementation and measurement capability,” Opt. Eng. 35, 2962–2969 (1996).
  5. P. E. Murphy, T. G. Brown, and D. T. Moore, “Optical Vernier interferometry for aspheric metrology,” in Emerging Lithographic Technologies III, Y. Vladimirsky, ed., Proc. SPIE 3676, 643–652 (1999).
  6. A. E. Lowman and J. E. Greivenkamp, “Interferometer induced wavefront errors when testing in a non-null configuration,” in Interferometry VI: Applications, R. J. Pryptniewicz, G. M. Brown, and W. E. Jeuptner, eds., Proc. SPIE 2004, 173–181 (1993).
  7. A. E. Lowman and J. E. Greivenkamp, “Modeling an interferometer for non-null testing of aspheres,” in Optical Manufacturing and Testing, V. J. Daugherty and H. Stabl, eds., Proc. SPIE 2536, 139–147 (1995).
  8. C. J. Evans, “Compensation for errors introduced by non-zero fringe densities in phase-measuring interferometers,” CIRP Annals 42/1, 577–580 (1993).
  9. C. J. Evans, “Software based improvements in the accuracy of measurement of aspherics using a Fizeau interferometer,” Optical Fabrication and Testing, Vol. 13 of 1994 OSA Technical Digest Series (Optical Society of America, Washington, D.C., 1994), pp. 259–267.
  10. R. E. Parks, C. J. Evans, P. J. Sullivan, L. Z. Shao, and B. Loucks, “Measurements of the LIGO Pathfinder optics,” in Optical Manufacturing and Testing II, H. Stahl, ed., Proc. SPIE 3134, 95–111 (1997).
  11. H. Kurita, K. Saito, M. Kato, and T. Yatagai, “Influence of system aberrations on interferometric aspheric surface testing,” in Laser and Nonlinear Optical Materials, L. G. DeShazer, ed., Proc. SPIE 680, 47–52 (1987).
  12. C. Huang, “Propagation errors in precision Fizeau interferometry,” Appl. Opt. 32, 7016–7021 (1993).
  13. P. E. Murphy, T. G. Brown, and D. T. Moore, “Interference imaging for aspheric surface testing,” Appl. Opt. 39, 2122–2129 (2000).
  14. W. T. Welford, Aberrations of Optical Systems (Hilger, Boston, 1986).
  15. H. Zhang, M. J. Lalor, and D. R. Burton, “Robust, accurate seven-sample phase-shifting algorithm insensitive to nonlinear phase-shift error and second-harmonic distortion: a comparative study,” Opt. Eng. 38, 1524–1533 (1999).

Cited By

Alert me when this paper is cited

OSA is able to provide readers links to articles that cite this paper by participating in CrossRef's Cited-By Linking service. CrossRef includes content from more than 3000 publishers and societies. In addition to listing OSA journal articles that cite this paper, citing articles from other participating publishers will also be listed.


« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited