Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Diffraction gratings of photosensitive ZrO2 gel films fabricated with the two-ultraviolet-beam interference method

Not Accessible

Your library or personal account may give you access

Abstract

Photosensitive ZrO2 gel films were patterned with a two-beam interference method by use of a 325-nm-wavelength He–Cd laser for the first time to our knowledge. The ZrO2 gel films were prepared from Zr(O-n-C4H9)4 chemically modified with benzoylacetone. We fabricated uniform gratings with a 0.5-µm period on Si or SiO2 substrates by etching the gel films in ethyl alcohol after UV irradiation. A maximum diffraction efficiency of 28% was attained with the grating fabricated on Si substrate under a Littrow mounting condition by use of a 633-nm-wavelength He–Ne laser. Blazed gratings could also be fabricated.

© 2000 Optical Society of America

Full Article  |  PDF Article
More Like This
Simple fabrication of diffraction gratings by two-beam interference method in highly photosensitive hybrid sol-gel films

Dong Jun Kang, Jin-Ki Kim, and Byeong-Soo Bae
Opt. Express 12(17) 3947-3953 (2004)

Single-step photopatterning of diffraction gratings in highly photosensitive hybrid sol-gel films

Dong Jun Kang, Jang-Ung Park, Byeong-Soo Bae, Junji Nishii, and Kenji Kintaka
Opt. Express 11(10) 1144-1148 (2003)

Fabrication and simulation of diffractive optical elements with superimposed antireflection subwavelength gratings

Fredrik Nikolajeff, Björn Löfving, Mathias Johansson, Jörgen Bengtsson, Sverker Hård, and Claus Heine
Appl. Opt. 39(26) 4842-4846 (2000)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved