Precise Interferometric Length and Phase-Change Measurement of Gauge Blocks Based on Reproducible Wringing
Applied Optics, Vol. 39, Issue 4, pp. 526-538 (2000)
http://dx.doi.org/10.1364/AO.39.000526
Acrobat PDF (1696 KB)
Abstract
A modern fringe-pattern-analyzing interferometer with a resolution of 1 × 10−9 and without exclusion of systematic uncertainties owing to optic effects of less than 1 nm was used to test a new method of interferometric length measurement based on a combination of the reproducible wringing and slave-block techniques. Measurements without excessive wringing film error are demonstrated for blocks with nominal lengths of 2–6 mm and with high surface flatness. The uncertainty achieved for these blocks is less than 1 nm. Deformations of steel gauge blocks and reference platens, caused by wringing forces, are investigated, and the necessary conditions for reproducible wringing are outlined. A subnanometer uncertainty level in phase-change-correction measurements has been achieved for gauge blocks as long as 100 mm. Limitations on the accuracy standard method of interferometric length measurements and shortcomings of the present definition of the length of the material artifact are emphasized.
© 2000 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
Citation
Alexandre Titov, Igor Malinovsky, Hakima Belaïdi, Ricardo S. França, and Carlos A. Massone, "Precise Interferometric Length and Phase-Change Measurement of Gauge Blocks Based on Reproducible Wringing," Appl. Opt. 39, 526-538 (2000)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-39-4-526
You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.
Contact your librarian or system administrator
or
Log in to access OSA Member Subscription
Related Journal Articles 
- Interferometry with optical pickups (OL)
- Toward Subnanometer Uncertainty in Interferometric Length Measurements of Short Gauge Blocks (AO)
- Testing of Rod Objects by Grazing-Incidence Interferometry: Experiment (AO)
- Robust phase demodulation of interferograms with open or closed fringes (JOSAA)
- Computerized interferometric surface measurements [Invited] (AO)
Related Conference Papers
- Metrology for the Space Interferometry Mission
- High Sensitivity Vibration Measurements with Absolute Calibration
- Advances in micro-lens surface metrology: The role of retrace errors
- Characterizing optical surfaces using the area structure function
- Estimation of wavefront degradation by determining peak positions of interference fringes in a single shot image
« Previous Article | Next Article »
OSA is a member of 