Polarized Differential-Phase Laser Scanning Microscope
Applied Optics, Vol. 40, Issue 1, pp. 95-99 (2001)
http://dx.doi.org/10.1364/AO.40.000095
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Abstract
A polarized differential-phase laser scanning microscope, which combines a polarized optical heterodyne Mach–Zehnder interferometer and a differential amplifier to scan the topographic image of a surface, is proposed. In the experiment the differential amplifier, which acts as a PM–AM converter in the experiment, converting phase modulation (PM) into amplitude modulation (AM). Then a novel, to our knowledge, phase demodulator was proposed and implemented for the differential-phase laser scanning microscope. An optical grating (1800 lp/mm) was imaged. The lateral and the depth resolutions of the imaging system were 0.5 μm and 1 nm, respectively. The detection accuracy, which was limited by the reflectivity variation of the test surface, is discussed.
© 2001 Optical Society of America
[Optical Society of America ]
OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(180.3170) Microscopy : Interference microscopy
(180.5810) Microscopy : Scanning microscopy
Citation
Chien Chou, Chung-Wei Lyu, and Li-Cheng Peng, "Polarized Differential-Phase Laser Scanning Microscope," Appl. Opt. 40, 95-99 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-1-95
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