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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 10 — Apr. 1, 2001
  • pp: 1617–1622

Total Internal Reflection for Precision Small-Angle Measurement

Aiyu Zhang and Peisen S. Huang  »View Author Affiliations


Applied Optics, Vol. 40, Issue 10, pp. 1617-1622 (2001)
http://dx.doi.org/10.1364/AO.40.001617


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Abstract

A method for precision small-angle measurement is proposed. This method is based on the total-internal-reflection effect of a light beam at a pair of glass prisms. Angular displacement of the light beam is measured when the intensity change of the reflected beam is detected as a result of the relative phase shift between the s- and the p-polarized beams. An initial phase shift between the s- and the p-polarized components is introduced to increase measurement sensitivity. For increased measurement linearity and reduced effect of laser power fluctuation on the output, a differential method is used in which the light beam is split equally into two beams, each reflected at a prism and detected by a photodiode. The output is obtained as the difference of the two detected intensities divided by their sum. A prototype device was built, which demonstrated a nonlinearity error of 1.3% in a measurement range of ∓0.6° or 0.4% in ∓0.3°. The peak-to-peak noise level was found to be at approximately 0.5 arc sec. This noise level can be reduced further and resolution increased by a reduction of the measurement range.

© 2001 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5700) Instrumentation, measurement, and metrology : Reflection
(260.3160) Physical optics : Interference
(260.5430) Physical optics : Polarization
(260.6970) Physical optics : Total internal reflection

Citation
Aiyu Zhang and Peisen S. Huang, "Total Internal Reflection for Precision Small-Angle Measurement," Appl. Opt. 40, 1617-1622 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-10-1617


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References

  1. P. S. Huang, S. Kiyono, and O. Kamada, “Angle measurement based on the internal reflection effect: a new method,” Appl. Opt. 31, 6047–6055 (1992).
  2. P. S. Huang and J. Ni, “Angle measurement based on the internal-reflection effect and the use of right-angle prisms,” Appl. Opt. 34, 4976–4981 (1995).
  3. P. S. Huang and J. Ni, “Angle measurement based on the internal-reflection effect using elongated critical-angle prisms,” Appl. Opt. 35, 2239–2241 (1996).
  4. P. S. Huang and Y. Li, “Small-angle measurement by use of a single prism,” Appl. Opt. 37, 6636–6642 (1998).
  5. P. S. Huang, “Use of thin films for high-sensitivity angle measurement,” Appl. Opt. 38, 4831–4836 (1999).
  6. P. S. Huang and J. Ni, “Angle measurement based on the internal-reflection effect and its application in measurement of geometric errors of machine tools,” in Proceedings of the American Society for Precision Engineering Annual Meeting (American Society for Precision Engineering, Raleigh, N.C., 1993), pp. 350–353.
  7. P. S. Huang and Y. Li, “Laser measurement instrument for fast calibration of machine tools,” in Proceedings: American Society for Precision Engineering Annual Meeting (American Society for Precision Engineering, Raleigh, N.C., 1996), pp. 112–115.
  8. P. S. Huang and X. Xu, “Design of an optical probe for surface profile measurement,” Opt. Eng. 38, 1223–1228 (1999).
  9. S. Zhang, S. Kiyono, Y. Uda, and M. Mito, “Development of a measurement system of the angular profile of the polygon mirror surface,” Int. J. Jpn. Soc. Precis. Eng. 30, 349–350 (1996).
  10. S. Kiyono, X. Shan, and H. Sato, “Development of an AFM using a critical angular sensor,” Int. J. Jpn. Soc. Precis. Eng. 27, 373–378 (1993).
  11. S. Zhang, S. Kiyono, and Y. Uda, “Nanoradian angle sensor and in situ self-calibration,” Appl. Opt. 37, 4154–4159 (1998).
  12. M.-H. Chiu and D.-C. Su, “Angle measurement using total-internal-reflection heterodyne interferometry,” Opt. Eng. 36, 1750–1753 (1997).
  13. M.-H. Chiu and D.-C. Su, “Improved technique for measuring small angles,” Appl. Opt. 36, 7104–7106 (1997).
  14. W. Zhou and L. Cai, “Interferometer for small-angle measurement based on total internal reflection,” Appl. Opt. 37, 5957–5963 (1998).
  15. W. Zhou and L. Cai, “An angular displacement interferometer based on total internal reflection,” Meas. Sci. Technol. 9, 1647–1652 (1998).
  16. W. Zhou and L. Cai, “Improved angle interferometer based on total internal reflection,” Appl. Opt. 38, 1179–1185 (1999).
  17. M. P. Kothiyal and C. Delisle, “Shearing interferometer for phase shifting interferometry with polarization phase shifter,” Appl. Opt. 24, 4439–4442 (1985).

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