Characterization of Excimer Lasers for Application to Lenslet Array Homogenizers
Applied Optics, Vol. 40, Issue 12, pp. 1931-1941 (2001)
http://dx.doi.org/10.1364/AO.40.001931
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Abstract
We investigate the best method of characterizing high-divergence lasers, such as excimer lasers, to suppress fine-scale intensity nonuniformity that is due to coherence effects of lenslet homogenizers. We show by a detailed analysis of the lenslet homogenizer that, for highest accuracy, a direct measurement of the value of the autocorrelation function should be made at the separation p of the lenslet elements, identified as the critical spatial period. We show that the commonly used characterization of lasers by the 1/e2 width of the angular divergence is not the most accurate test and may overstate or understate the effectiveness of a given laser.
© 2001 Optical Society of America
OCIS Codes
(030.1640) Coherence and statistical optics : Coherence
(030.6140) Coherence and statistical optics : Speckle
(030.6600) Coherence and statistical optics : Statistical optics
(050.1940) Diffraction and gratings : Diffraction
(070.2580) Fourier optics and signal processing : Paraxial wave optics
(140.2180) Lasers and laser optics : Excimer lasers
Citation
Ying Lin, George N. Lawrence, and Jesse Buck, "Characterization of Excimer Lasers for Application to Lenslet Array Homogenizers," Appl. Opt. 40, 1931-1941 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-12-1931
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