Abstract

Different materials with different phase changes on reflection affect the surface-height measurement when interferometric techniques are employed for testing objects constructed of different materials that are adjacent to one another. We test the influence of this phase change on reflection when vertical scanning interferometry with a broadband source is used. We show theoretically and experimentally that the strong linear dependence of the dispersion of the phase change on reflection preserves the shape of the coherence envelope of the fringes but shifts it along the optical axis by approximately 10–40 nm for metallic surfaces.

© 2001 Optical Society of America

Compensation of phase change on reflection in white-light interferometry for step height measurement

Min-Cheol Park and Seung-Woo Kim
Opt. Lett. 26(7) 420-422 (2001)

Effects of phase change on reflection in phase-measuring interference microscopy

Arnaud Dubois
Appl. Opt. 43(7) 1503-1507 (2004)

Interferometric measurement of phase change on reflection

Kate M. Medicus, Marcus Chaney, John E. Brodziak, Jr., and Angela Davies
Appl. Opt. 46(11) 2027-2035 (2007)

Single-shot measurement of carrier-envelope phase changes by spectral interferometry

Masayuki Kakehata, Hideyuki Takada, Yohei Kobayashi, Kenji Torizuka, Yoshihiko Fujihira, Tetsuya Homma, and Hideo Takahashi
Opt. Lett. 26(18) 1436-1438 (2001)

Stable carrier generation and phase-resolved digital data processing in optical coherence tomography

Johannes F. de Boer, Christopher E. Saxer, and J. Stuart Nelson
Appl. Opt. 40(31) 5787-5790 (2001)