Extreme-ultraviolet lensless Fourier-transform holography
Applied Optics, Vol. 40, Issue 16, pp. 2655-2661 (2001)
http://dx.doi.org/10.1364/AO.40.002655
Acrobat PDF (3282 KB)
Abstract
We demonstrate 100-nm-resolution holographic aerial image monitoring based on lensless Fourier-transform holography at extreme-UV (EUV) wavelengths, using synchrotron-based illumination. This method can be used to monitor the coherent imaging performance of EUV lithographic optical systems. The system has been implemented in the EUV phase-shifting point-diffraction interferometer recently developed at Lawrence Berkeley National Laboratory. Here we introduce the idea of the holographic aerial image-recording technique and present imaging performance characterization results for a 10× Schwarzschild objective, a prototype EUV lithographic optic. The results are compared with simulations, and good agreement is obtained. Various object patterns, including phase-shift-enhanced patterns, have been studied. Finally, the application of the holographic aerial image-recording technique to EUV multilayer mask-blank defect characterization is discussed.
© 2001 Optical Society of America
[Optical Society of America ]
OCIS Codes
(050.1950) Diffraction and gratings : Diffraction gratings
(050.1960) Diffraction and gratings : Diffraction theory
(050.5080) Diffraction and gratings : Phase shift
(070.2580) Fourier optics and signal processing : Paraxial wave optics
(070.2590) Fourier optics and signal processing : ABCD transforms
(220.3740) Optical design and fabrication : Lithography
Citation
Sang Hun Lee, Patrick Naulleau, Kenneth A. Goldberg, Chang Hyun Cho, SeongTae Jeong, and Jeffrey Bokor, "Extreme-ultraviolet lensless Fourier-transform holography," Appl. Opt. 40, 2655-2661 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-16-2655
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