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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 19 — Jul. 1, 2001
  • pp: 3220–3224

On-line monitoring of one-step laser fabrication of micro-optical components

J. Enrique Juliá and Juan Carlos Soriano  »View Author Affiliations


Applied Optics, Vol. 40, Issue 19, pp. 3220-3224 (2001)
http://dx.doi.org/10.1364/AO.40.003220


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Abstract

The use of an on-line monitoring method based on photoelasticity techniques for the fabrication of micro-optical components by means of controlled laser heating is described. From this description it is possible to show in real time the mechanical stresses that form the microelement. A new parameter, stressed area, is introduced that quantifies the stresses of a microelement during its fabrication, facilitating a deeper understanding of the physical phenomena involved in the process as well as being a useful test of quality. It also permits the stress produced in the manufacturing process and the optical properties of the final microelement to be correlated. The results for several microlenses monitored with this technique are presented.

© 2001 Optical Society of America

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4840) Optical design and fabrication : Testing
(350.3950) Other areas of optics : Micro-optics

History
Original Manuscript: July 17, 2000
Revised Manuscript: March 6, 2001
Published: July 1, 2001

Citation
J. Enrique Juliá and Juan Carlos Soriano, "On-line monitoring of one-step laser fabrication of micro-optical components," Appl. Opt. 40, 3220-3224 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-19-3220


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References

  1. H. P. Herzig, ed., Micro-Optics: Elements, Systems and Applications (Taylor & Francis, London, 1997).
  2. J. Göttert, M. Fischer, A. Müller, “High-aperture surface relief microlenses fabricated by x-ray lithography and melting,” in Proceedings of Conference on Microlens Arrays (European Optical Society, Teddington, UK, 1995), pp. 21–25.
  3. Z. D. Popovic, R. A. Sprague, G. A. N. Connell, “Technique for monolithic fabrication of microlens arrays,” Appl. Opt. 27, 1281–1284 (1988). [CrossRef] [PubMed]
  4. N. F. Borrelli, D. L. Morse, “Microlens arrays produced by a photolytic technique,” Appl. Opt. 27, 476–479 (1988). [CrossRef] [PubMed]
  5. D. Daly, R. F. Stevens, M. C. Hutley, N. Davies, “The manufacture of microlenses by melting photoresist,” in Microlens Arrays, M. C. Hutley, ed., Vol. 30 of IOP Short Meetings Series (Institute of Physics, Bristol, UK, 1991), pp. 23–34.
  6. S. Lazare, J. Lopez, J. Turlet, M. Kufner, S. Kufner, P. Chavel, “Microlenses fabricated by ultraviolet excimer laser irradiation of poly(methyl methacrylate) followed by styrene diffusion,” Appl. Opt. 35, 4471–4475 (1996). [CrossRef] [PubMed]
  7. X. Wang, J. R. Leger, R. H. Rediker, “Rapid fabrication of diffractive optical elements by use of image-based excimer laser ablation,” Appl. Opt. 36, 4660–4665 (1997).
  8. M. C. Hutley, ed., Microlens Arrays, Vol. 30 of IOP Short Meetings Series (Institute of Physics, Bristol, UK, 1991).
  9. S. Haselbeck, H. Schreiber, J. Schwiderand, N. Streibl, “Microlenses fabricated by melting photoresist on a base layer,” Opt. Eng. 32, 1322–1324 (1993). [CrossRef]
  10. B. P. Keyworth, D. J. Corazza, J. N. McMullin, L. Mabbott, “Single-step fabrication of refractive microlens arrays,” Appl. Opt. 36, 2198–2202 (1997). [CrossRef] [PubMed]
  11. S. Calixto, Z. Malacara, “Micromirror fabrication using dye-doped plastic,” Opt. Eng. 37, 2320–2323 (1998). [CrossRef]
  12. V. P. Veiko, Y. B. Yakovlev, “Physical fundamentals of laser forming of micro-optical components,” Opt. Eng. 33, 3567–3571 (1994). [CrossRef]
  13. M. Wakaki, Y. Komachi, G. Kanai, “Microlenses and microlens arrays formed on a glass plate by use of a CO2 laser,” Appl. Opt. 37, 627–631 (1998). [CrossRef]
  14. G. Beadie, N. M. Lawandy, “Single-step laser fabrication of refractive microlenses in semiconductor-doped glasses,” Opt. Lett. 20, 2153–2155 (1995).
  15. S. Calixto, G. Paez Padilla, “Micromirrors and microlenses fabricated on polymer materials by means of infrared radiation,” Appl. Opt. 35, 6126–6130 (1996). [CrossRef] [PubMed]
  16. A. C. Tam, I. K. Pour, P. Baumgart, “New laser texturing process of magnetic disks for stiction reduction,” in Laser Processing of Materials and Industrial Applications, S.-S. Deng, S. C. Wang, eds., Proc. SPIE2888, 97–107 (1996).
  17. J. E. Juliá, R. Estrela, “On-line monitoring of the manufacture process of optical microelements by laser heating,” in Optical Diagnostics of Materials and Devices for Opto-, Micro-, and Quantum Electronics IV, Proc. SPIE (in press).
  18. J. W. Dally, W. F. Riley, Experimental Stress Analysis (McGraw-Hill, Kogakusha, Tokyo, 1978).
  19. F. Dahmani, A. W. Schnid, J. C. Lambropoulos, S. Burns, “Dependence of birrefrigence and residual stress near laser-induced cracks in fused silica on laser fluence and on laser-pulse number,” Appl. Opt. 37, 7772–7784 (1998). [CrossRef]
  20. A. R. Boyain y Goitia, A. N. Starodumov, D. Monzon-Hernandez, V. N. Filippov, P. Gavrilovic, “Birrefrigence measurement in double-clad fiber lasers with large cross section,” Appl. Opt. 39, 2259–2263 (2000). [CrossRef]
  21. V. P. Veiko, A. K. Kromin, E. B. Yakovlev, “Laser fabrication of MOC based on soft laser heating of glass and glass-like materials,” in Miniature and Micro-Optics and Micromechanics, N. C. Gallagher, C. S. Roychoudhuri, eds., Proc. SPIE1992, 159–167 (1993). [CrossRef]

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