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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 40, Iss. 19 — Jul. 1, 2001
  • pp: 3220–3224

On-line monitoring of one-step laser fabrication of micro-optical components

J. Enrique Juliá and Juan Carlos Soriano  »View Author Affiliations


Applied Optics, Vol. 40, Issue 19, pp. 3220-3224 (2001)
http://dx.doi.org/10.1364/AO.40.003220


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Abstract

The use of an on-line monitoring method based on photoelasticity techniques for the fabrication of micro-optical components by means of controlled laser heating is described. From this description it is possible to show in real time the mechanical stresses that form the microelement. A new parameter, stressed area, is introduced that quantifies the stresses of a microelement during its fabrication, facilitating a deeper understanding of the physical phenomena involved in the process as well as being a useful test of quality. It also permits the stress produced in the manufacturing process and the optical properties of the final microelement to be correlated. The results for several microlenses monitored with this technique are presented.

© 2001 Optical Society of America

OCIS Codes
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4840) Optical design and fabrication : Testing
(350.3950) Other areas of optics : Micro-optics

History
Original Manuscript: July 17, 2000
Revised Manuscript: March 6, 2001
Published: July 1, 2001

Citation
J. Enrique Juliá and Juan Carlos Soriano, "On-line monitoring of one-step laser fabrication of micro-optical components," Appl. Opt. 40, 3220-3224 (2001)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-40-19-3220

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