Expand this Topic clickable element to expand a topic
Skip to content
Optica Publishing Group

Tolerancing of diffraction-limited Kirkpatrick–Baez synchrotron beamline optics for extreme-ultraviolet metrology

Not Accessible

Your library or personal account may give you access

Abstract

The recent interest in extreme-ultraviolet (EUV) lithography has led to the development of an array of at-wavelength metrologies implemented on synchrotron beamlines. These beamlines commonly use Kirkpatrick–Baez (K–B) systems consisting of two perpendicular, elliptically bent mirrors in series. To achieve high-efficiency focusing into a small spot, unprecedented fabrication and assembly tolerance is required of these systems. Here we present a detailed error-budget analysis and develop a set of specifications for diffraction-limited performance for the K–B optic operating on the EUV interferometry beamline at Lawrence Berkeley National Laboratory’s Advanced Light Source. The specifications are based on code v modeling tools developed explicitly for these optical systems. Although developed for one particular system, the alignment sensitivities presented here are relevant to K–B system designs in general.

© 2001 Optical Society of America

Full Article  |  PDF Article
More Like This
Extreme-ultraviolet lensless Fourier-transform holography

Sang Hun Lee, Patrick Naulleau, Kenneth A. Goldberg, Chang Hyun Cho, SeongTae Jeong, and Jeffrey Bokor
Appl. Opt. 40(16) 2655-2661 (2001)

Extreme-ultraviolet phase-shifting point-diffraction interferometer: a wave-front metrology tool with subangstrom reference-wave accuracy

Patrick P. Naulleau, Kenneth A. Goldberg, Sang H. Lee, Chang Chang, David Attwood, and Jeffrey Bokor
Appl. Opt. 38(35) 7252-7263 (1999)

Calibration of an extreme-ultraviolet transmission grating spectrometer with synchrotron radiation

John F. Seely, Charles M. Brown, Glenn E. Holland, Frederick Hanser, John Wise, James L. Weaver, Raj Korde, Rodney A. Viereck, Richard Grubb, and Darrell L. Judge
Appl. Opt. 40(10) 1623-1630 (2001)

Cited By

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Figures (8)

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Tables (5)

You do not have subscription access to this journal. Article tables are available to subscribers only. You may subscribe either as an Optica member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Login to access Optica Member Subscription

Select as filters


Select Topics Cancel
© Copyright 2024 | Optica Publishing Group. All Rights Reserved