MoRu–Be multilayer coatings were applied to two diffraction gratings for the purpose of enhancing their normal-incidence efficiency in the 11.1–12.0-nm wavelength range. The grating substrates were replicas of a holographic master grating that had a blazed groove profile with 2400 grooves/mm and a 2-m radius of curvature. The relatively low average microroughness (0.8 nm) of the grating surfaces contributed to the relatively high groove efficiency of the grating substrates and the reflectance of the MoRu–Be multilayer coatings. The peak efficiency, measured with synchrotron radiation, was 10.4% in the second diffraction order at a wavelength of 11.37 nm.
© 2001 Optical Society of America
Original Manuscript: October 6, 2000
Revised Manuscript: June 15, 2001
Published: November 1, 2001
John F. Seely, Claude Montcalm, Sherry Baker, and Saša Bajt, "High-efficiency MoRu–Be multilayer-coated gratings operating near normal incidence in the 11.1–12.0-nm wavelength range," Appl. Opt. 40, 5565-5574 (2001)