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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 10 — Apr. 1, 2002
  • pp: 1949–1953

Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer

Takamasa Suzuki, Toshiyuki Maki, Xuefeng Zhao, and Osami Sasaki  »View Author Affiliations


Applied Optics, Vol. 41, Issue 10, pp. 1949-1953 (2002)
http://dx.doi.org/10.1364/AO.41.001949


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Abstract

A surface profiler that incorporates a feedback controller to eliminate external disturbances is proposed and demonstrated. Its overall performance is dependent on the frequency response of the feedback loop. The frequency of the modulating signal strongly influences the response of the feedback controller. When we used the integrating-bucket method, the CCD camera had to be operated at a low-frequency video rate. Our technique uses a CCD camera equipped with an electronic shutter. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating-bucket method under the standard video rate.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers

History
Original Manuscript: June 19, 2001
Revised Manuscript: October 3, 2001
Published: April 1, 2002

Citation
Takamasa Suzuki, Toshiyuki Maki, Xuefeng Zhao, and Osami Sasaki, "Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer," Appl. Opt. 41, 1949-1953 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-10-1949


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References

  1. T. Yoshino, M. Nara, S. Mnatzakanian, B. S. Lee, T. C. Strand, “Laser diode feedback interferometer for stabilization and displacement measurements,” Appl. Opt. 26, 892–897 (1987). [CrossRef] [PubMed]
  2. T. Suzuki, T. Okada, O. Sasaki, T. Maruyama, “Real-time vibration measurement using a feedback type of laser diode interferometer with an optical fiber,” Opt. Eng. 36, 2496–2502 (1997). [CrossRef]
  3. J. Liu, I. Yamaguchi, J. Kato, T. Nakajima, “Active phase-shifting interferometer using current modulation of a laser diode,” Opt. Rev. 3, 287–292 (1996). [CrossRef]
  4. I. Yamaguchi, J. Liu, J. Kato, “Active phase-shifting interferometers for shape and deformation measurements,” Opt. Eng. 35, 2930–2937 (1996). [CrossRef]
  5. O. Sasaki, H. Okazaki, M. Sakai, “Sinusoidal phase modulating interferometer using the integrating-bucket method,” Appl. Opt. 26, 1089–1093 (1987). [CrossRef] [PubMed]
  6. T. Suzuki, O. Sasaki, J. Kaneda, T. Maruyama, “Real-time two-dimensional surface profile measurement in sinusoidal phase modulating laser diode interferometer,” Opt. Eng. 33, 2754–2759 (1994). [CrossRef]
  7. O. Sasaki, K. Takahashi, T. Suzuki, “Sinusoidal phase modulating laser diode interferometer with a feedback control system to eliminate external disturbance,” Opt. Eng. 29, 1511–1515 (1990). [CrossRef]

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