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Applied Optics

Applied Optics


  • Vol. 41, Iss. 10 — Apr. 1, 2002
  • pp: 1949–1953

Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer

Takamasa Suzuki, Toshiyuki Maki, Xuefeng Zhao, and Osami Sasaki  »View Author Affiliations

Applied Optics, Vol. 41, Issue 10, pp. 1949-1953 (2002)

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A surface profiler that incorporates a feedback controller to eliminate external disturbances is proposed and demonstrated. Its overall performance is dependent on the frequency response of the feedback loop. The frequency of the modulating signal strongly influences the response of the feedback controller. When we used the integrating-bucket method, the CCD camera had to be operated at a low-frequency video rate. Our technique uses a CCD camera equipped with an electronic shutter. The shutter function enables us to apply high-speed sinusoidal phase modulation to the conventional integrating-bucket method under the standard video rate.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers

Original Manuscript: June 19, 2001
Revised Manuscript: October 3, 2001
Published: April 1, 2002

Takamasa Suzuki, Toshiyuki Maki, Xuefeng Zhao, and Osami Sasaki, "Disturbance-free high-speed sinusoidal phase-modulating laser diode interferometer," Appl. Opt. 41, 1949-1953 (2002)

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  1. T. Yoshino, M. Nara, S. Mnatzakanian, B. S. Lee, T. C. Strand, “Laser diode feedback interferometer for stabilization and displacement measurements,” Appl. Opt. 26, 892–897 (1987). [CrossRef] [PubMed]
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