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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 10 — Apr. 1, 2002
  • pp: 1972–1976

Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation

Takamasa Suzuki, Takayuki Yazawa, and Osami Sasaki  »View Author Affiliations


Applied Optics, Vol. 41, Issue 10, pp. 1972-1976 (2002)
http://dx.doi.org/10.1364/AO.41.001972


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Abstract

We describe an interferometer system that uses two separate wavelengths to measure step height. The overlapping interference images detected by a CCD camera are easily separated by an ordinary integrating-bucket method and time-sharing sinusoidal phase modulation, in which two laser diodes are alternately modulated with a sinusoidal signal. A phase map is obtained only for the laser diode into which the modulation signal is injected. In this instance, a 1-µm step height was accurately detected.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.5060) Instrumentation, measurement, and metrology : Phase modulation
(120.6660) Instrumentation, measurement, and metrology : Surface measurements, roughness
(140.2020) Lasers and laser optics : Diode lasers

History
Original Manuscript: July 23, 2001
Revised Manuscript: October 31, 2001
Published: April 1, 2002

Citation
Takamasa Suzuki, Takayuki Yazawa, and Osami Sasaki, "Two-wavelength laser diode interferometer with time-sharing sinusoidal phase modulation," Appl. Opt. 41, 1972-1976 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-10-1972

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