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Applied Optics

Applied Optics


  • Vol. 41, Iss. 13 — May. 1, 2002
  • pp: 2394–2400

Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm

Benjawan Sae-Lao, Saša Bajt, Claude Montcalm, and John F. Seely  »View Author Affiliations

Applied Optics, Vol. 41, Issue 13, pp. 2394-2400 (2002)

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The first experimental investigation of a normal-incidence Mo–Y multilayer-coated diffraction grating operating at a 9-nm wavelength is reported. The substrate is a replica of a concave holographic ion-etched blazed grating with 2400 grooves/mm and a 2-m radius of curvature. The measured peak efficiency in the −3 order is 2.7% at a wavelength of 8.79 nm. To our knowledge, this is the highest normal-incidence grating efficiency ever obtained in this wavelength region.

© 2002 Optical Society of America

OCIS Codes
(050.0050) Diffraction and gratings : Diffraction and gratings
(050.1950) Diffraction and gratings : Diffraction gratings
(230.4170) Optical devices : Multilayers
(310.6860) Thin films : Thin films, optical properties
(340.7470) X-ray optics : X-ray mirrors
(350.1260) Other areas of optics : Astronomical optics

Original Manuscript: November 5, 2001
Revised Manuscript: February 5, 2002
Published: May 1, 2002

Benjawan Sae-Lao, Saša Bajt, Claude Montcalm, and John F. Seely, "Performance of normal-incidence molybdenum-yttrium multilayer-coated diffraction grating at a wavelength of 9 nm," Appl. Opt. 41, 2394-2400 (2002)

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