Optical interferometry for measurement of the geometric dimensions of industrial parts

Peter de Groot; Jim Biegen; Jack Clark; Xavier Colonna de Lega; David Grigg

doi:10.1364/AO.41.003853

Applied Optics
Vol. 41,
Issue 19,
pp. 3853-3860
(2002)
•https://doi.org/10.1364/AO.41.003853

Optical interferometry for measurement of the geometric dimensions of industrial parts

Peter de Groot, Jim Biegen, Jack Clark, Xavier Colonna de Lega, and David Grigg

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Peter de Groot, Jim Biegen, Jack Clark, Xavier Colonna de Lega, and David Grigg, "Optical interferometry for measurement of the geometric dimensions of industrial parts," Appl. Opt. 41, 3853-3860 (2002)

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Abstract

We describe an instrument for the measurement of surface flatness, parallelism, and size (thickness) of plane-parallel parts in a single measurement to 1σ gauge capability of 0.02, 0.03, and 0.06 µm, respectively. A low-coherence IR profiler viewing both sides of the part simultaneously, believed to be novel, accommodates a wide variety of industrial surface finishes, including machined, ground, or lapped parts, with a 75-mm field of view and 15,000 pixels per side. A heterodyne laser displacement gauge together with an integrated zeroing system allows for a range of part sizes from 0 to 100 mm.

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Step 1	Characterize the flatness of each of the surface profiles A and B by calculation of the difference between the highest and lowest height values after subtraction of a best-fit plane.
Step 2	Characterize the parallelism of the surface profiles A and B by fitting planes to each of the surfaces by use of least-squares techniques, then calculate the difference between the highest and lowest separations of these best-fit planes.
Step 3	Characterize the size of the part by calculation of the average difference of the two surface profiles A and B.

Step 1	Remove any part that may be in the instrument and move the focus stages to zero-gauge initialization position. Images A and B are now of the front and rear sides of the uncoated surface of the zero-gauge artifact (see Fig. 5) and there will be visible interference fringes.
Step 2	Measure zero-gauge artifact by means of a reference mirror scan. Generate reference profiles that will be subtracted from all subsequent profiles.
Step 3	Zero DMI measurements.

Step 1	Insert part and move focus stages so that the part surfaces are sharply in focus and there are interference fringes. In production testing, this is done when the stored part parameters are recalled. Images A and B are now of the front and rear sides of the part (see Fig. 5).
Step 2	Adjust part position as needed by use of stage motors to minimize tip and tilt. This is normally an automatic function by use of information gathered from a rapid sub-Nyquist scan of the part surface.
Step 3	Measure part surfaces by means of a reference mirror scan. Generate surface profiles.
Step 4	Correct for the relative orientation of the optical datum planes by use of the DMI data, e.g., by means of Eq. (4).
Step 5	Subtract from surface profiles A and B the corresponding profiles of the artifact generated during the zero-gauge initialization procedure.

Sample	Trial
Sample	1A	1B	1C	2A	2B	2C	Standard Deviation
1	1244.85	1244.90	1244.87	1244.89	1244.92	1244.85	0.028
2	1244.28	1244.28	1244.28	1244.26	1244.24	1244.27	0.016
3	1245.20	1245.20	1245.16	1245.15	1245.17	1245.20	0.023
4	1244.67	1244.66	1244.60	1244.60	1244.67	1244.68	0.035
5	1244.14	1244.13	1244.19	1244.10	1244.16	1244.10	0.035
6	1244.75	1244.87	1244.75	1244.77	1244.75	1244.74	0.048
7	1244.71	1244.64	1244.68	1244.61	1244.64	1244.60	0.044
8	1243.92	1243.89	1243.79	1243.82	1243.85	1243.85	0.046
9	1244.15	1244.13	1244.07	1244.16	1244.17	1244.13	0.037
10	1244.41	1244.53	1244.50	1244.45	1244.55	1244.56	0.058
Average							0.037

Sample	NIST (mm)	Simetra (mm)	Difference (µm)
1	2.000052	2.000121	-0.069
2	4.999978	4.999857	0.121
3	10.00001	10.000033	-0.023
4	29.999912	29.999539	0.373
Average difference			0.147

Abstract

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Equations (4)

Applied Optics