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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 3978–3987

General transfer-matrix method for optical multilayer systems with coherent, partially coherent, and incoherent interference

Charalambos C. Katsidis and Dimitrios I. Siapkas  »View Author Affiliations


Applied Optics, Vol. 41, Issue 19, pp. 3978-3987 (2002)
http://dx.doi.org/10.1364/AO.41.003978


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Abstract

The optical response of coherent thin-film multilayers is often represented with Fresnel coefficients in a 2 × 2 matrix configuration. Here the usual transfer matrix was modified to a generic form, with the ability to use the absolute squares of the Fresnel coefficients, so as to include incoherent (thick layers) and partially coherent (rough surface or interfaces) reflection and transmission. The method is integrated by use of models for refractive-index depth profiling. The utility of the method is illustrated with various multilayer structures formed by ion implantation into Si, including buried insulating and conducting layers, and multilayers with a thick incoherent layer in an arbitrary position.

© 2002 Optical Society of America

OCIS Codes
(080.2730) Geometric optics : Matrix methods in paraxial optics
(240.0310) Optics at surfaces : Thin films
(240.5770) Optics at surfaces : Roughness
(300.6340) Spectroscopy : Spectroscopy, infrared
(300.6470) Spectroscopy : Spectroscopy, semiconductors
(310.6860) Thin films : Thin films, optical properties

History
Original Manuscript: June 27, 2001
Revised Manuscript: January 14, 2002
Published: July 1, 2002

Citation
Charalambos C. Katsidis and Dimitrios I. Siapkas, "General transfer-matrix method for optical multilayer systems with coherent, partially coherent, and incoherent interference," Appl. Opt. 41, 3978-3987 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-3978

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