General Transfer-Matrix Method for Optical Multilayer Systems with Coherent, Partially Coherent, and Incoherent Interference
Applied Optics, Vol. 41, Issue 19, pp. 3978-3987 (2002)
http://dx.doi.org/10.1364/AO.41.003978
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Abstract
The optical response of coherent thin-film multilayers is often represented with Fresnel coefficients in a 2 × 2 matrix configuration. Here the usual transfer matrix was modified to a generic form, with the ability to use the absolute squares of the Fresnel coefficients, so as to include incoherent (thick layers) and partially coherent (rough surface or interfaces) reflection and transmission. The method is integrated by use of models for refractive-index depth profiling. The utility of the method is illustrated with various multilayer structures formed by ion implantation into Si, including buried insulating and conducting layers, and multilayers with a thick incoherent layer in an arbitrary position.
© 2002 Optical Society of America
OCIS Codes
(080.2730) Geometric optics : Matrix methods in paraxial optics
(240.0310) Optics at surfaces : Thin films
(240.5770) Optics at surfaces : Roughness
(300.6340) Spectroscopy : Spectroscopy, infrared
(300.6470) Spectroscopy : Spectroscopy, semiconductors
(310.6860) Thin films : Thin films, optical properties
Citation
Charalambos C. Katsidis and Dimitrios I. Siapkas, "General Transfer-Matrix Method for Optical Multilayer Systems with Coherent, Partially Coherent, and Incoherent Interference," Appl. Opt. 41, 3978-3987 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-3978
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