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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 19 — Jul. 1, 2002
  • pp: 4036–4038

iTIRM as a Tool for Qualifying Polishing Processes

Oliver W. Fähnle, Torsten Wons, Evelyn Koch, Sebastién Debruyne, Mark Meeder, Silvia M. Booij, and Joseph J. M. Braat  »View Author Affiliations


Applied Optics, Vol. 41, Issue 19, pp. 4036-4038 (2002)
http://dx.doi.org/10.1364/AO.41.004036


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Abstract

We report on what we believe to be a novel classification method for polishing processes that we apply in our laboratory on a regular basis. Two parameters are deduced from the in situ iTIRM (intensity-detecting total-internal-reflection microscopy) measurement method. Contrary to Preston’s law, which gives the removal rate, the parameters of the iTIRM process are a measure of the change in surface quality (roughness, subsurface damage, and scratch and dig) and the duration of the polishing process.

© 2002 Optical Society of America

OCIS Codes
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(220.5450) Optical design and fabrication : Polishing

Citation
Oliver W. Fähnle, Torsten Wons, Evelyn Koch, Sebastién Debruyne, Mark Meeder, Silvia M. Booij, and Joseph J. M. Braat, "iTIRM as a Tool for Qualifying Polishing Processes," Appl. Opt. 41, 4036-4038 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-19-4036

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