We report on what we believe to be a novel classification method for polishing processes that we apply in our laboratory on a regular basis. Two parameters are deduced from the <i>in situ</i> iTIRM (intensity-detecting total-internal-reflection microscopy) measurement method. Contrary to Preston’s law, which gives the removal rate, the parameters of the iTIRM process are a measure of the change in surface quality (roughness, subsurface damage, and scratch and dig) and the duration of the polishing process.
© 2002 Optical Society of America
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.4610) Instrumentation, measurement, and metrology : Optical fabrication
(120.4630) Instrumentation, measurement, and metrology : Optical inspection
(120.4800) Instrumentation, measurement, and metrology : Optical standards and testing
(220.5450) Optical design and fabrication : Polishing
Oliver W. Fähnle, Torsten Wons, Evelyn Koch, Sebastién Debruyne, Mark Meeder, Silvia M. Booij, and Joseph J. M. Braat, "iTIRM as a Tool for Qualifying Polishing Processes," Appl. Opt. 41, 4036-4038 (2002)