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Applied Optics

Applied Optics


  • Vol. 41, Iss. 22 — Aug. 1, 2002
  • pp: 4571–4578

Determination of fringe order in white-light interference microscopy

Peter de Groot, Xavier Colonna de Lega, Jim Kramer, and Michael Turzhitsky  »View Author Affiliations

Applied Optics, Vol. 41, Issue 22, pp. 4571-4578 (2002)

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Combining phase and coherence information for improved precision in white-light interference microscopy requires a robust strategy for dealing with the inconsistencies between these two types of information. We correct for these inconsistencies on every measurement by direct analysis of the difference map between the coherence and the phase profiles. The algorithm adapts to surface texture and noise level and dynamically compensates for optical aberrations, distortions, diffraction, and dispersion that would otherwise lead to incorrect fringe order. The same analysis also provides the absolute height data that are essential to relational measurements between disconnected surfaces.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.3040) Machine vision : Industrial inspection
(150.6910) Machine vision : Three-dimensional sensing

Original Manuscript: November 20, 2001
Revised Manuscript: April 9, 2002
Published: August 1, 2002

Peter de Groot, Xavier Colonna de Lega, Jim Kramer, and Michael Turzhitsky, "Determination of fringe order in white-light interference microscopy," Appl. Opt. 41, 4571-4578 (2002)

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