Prototype Results of a Phase-Shifting Interferometer Capable of Measuring the Complex Index and Profile of a Test Surface
Applied Optics, Vol. 41, Issue 25, pp. 5298-5312 (2002)
http://dx.doi.org/10.1364/AO.41.005298
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Abstract
Results are presented from a prototype phase-shifting interferometer capable of measuring both the real and the imaginary part of the complex index of refraction and the surface profile of a test surface. The three parameters of interest are extracted from the measured data by maximum-likelihood estimation theory. The performance of the system is quantitatively assessed with Cramer-Rao lower bounds. The results are shown to be strongly dependent on the quantization of the interferograms from the 8-bit CCD camera, the incident electric field amplitude, and the relative amplitude and phase difference of each polarized component through each arm of the interferometer.
© 2002 Optical Society of America
[Optical Society of America ]
OCIS Codes
(100.3010) Image processing : Image reconstruction techniques
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(160.4760) Materials : Optical properties
(240.0240) Optics at surfaces : Optics at surfaces
Citation
Eric W. Rogala and Harrison H. Barrett, "Prototype Results of a Phase-Shifting Interferometer Capable of Measuring the Complex Index and Profile of a Test Surface," Appl. Opt. 41, 5298-5312 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-25-5298
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