Multilayer coatings with a small number of layers were designed and prepared to provide an increase in normal-incidence reflectance in the extreme ultraviolet compared with the reflectance of available single-layer coatings, namely, SiC, B₄C, and Ir. Multilayers were designed to produce coatings with the highest possible reflectance at 91.2 and at 58.4 nm. At these wavelengths all the materials absorb radiation strongly, but still a reflectance enhancement can be obtained by means of sub-quarter-wave multilayer coatings with two or more different materials. Sub-quarter-wave multilayer coatings based on Al, MgF₂, diamondlike carbon, B₄C, SiC, and Ir showed higher reflectance than single-layer coatings of SiC and B₄C not only at the target wavelength but in a wide band ranging from 50 nm to the 121.6-nm H Lyman-α line. Multilayer coatings suffered some reflectance degradation over time. However, after approximately 80–100 days of aging in a desiccator, the reflectance for the multilayer coatings was greater than for the single-layer coatings.

© 2002 Optical Society of America

[Optical Society of America ]

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