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Applied Optics

Applied Optics


  • Vol. 41, Iss. 34 — Dec. 2, 2002
  • pp: 7173–7178

Characterization of an ultraviolet and a vacuum-ultraviolet irradiance meter with synchrotron radiation

Ping-Shine Shaw, Rajeev Gupta, and Keith R. Lykke  »View Author Affiliations

Applied Optics, Vol. 41, Issue 34, pp. 7173-7178 (2002)

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We have constructed and characterized a simple probe that is suitable for accurate measurements of irradiance in the UV to the vacuum UV spectral range. The irradiance meter consists of a PtSi detector located behind a 5-mm-diameter aperture. The probe was characterized at various wavelengths ranging from 130 to 320 nm by use of continuously tunable synchrotron radiation from the Synchrotron Ultraviolet Radiation Facility III. We determined the irradiance responsivity by scanning a small monochromatic beam over the active area of the irradiance meter and measuring its response on a grid with regular spacing. The angular response was also determined and shown to be suitable for applications such as photolithography. In addition, we studied the radiation damage using a 157-nm excimer laser and found that the irradiance meter can endure more than 100 J/cm2 of 157-nm radiation before a noticeable change occurs in its responsivity. Many industrial applications such as UV curing, photolithography, or semiconductor chip fabrication that require accurate measurement of the irradiance would benefit from having such a stable, accurate UV irradiance meter.

© 2002 Optical Society of America

OCIS Codes
(040.6070) Detectors : Solid state detectors
(040.7190) Detectors : Ultraviolet
(120.0280) Instrumentation, measurement, and metrology : Remote sensing and sensors
(120.5630) Instrumentation, measurement, and metrology : Radiometry

Original Manuscript: April 16, 2002
Revised Manuscript: August 26, 2002
Published: December 1, 2002

Ping-Shine Shaw, Rajeev Gupta, and Keith R. Lykke, "Characterization of an ultraviolet and a vacuum-ultraviolet irradiance meter with synchrotron radiation," Appl. Opt. 41, 7173-7178 (2002)

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  1. G. Xu, X. Huang, “Characterization and calibration of broadband ultraviolet radiometers,” Metrologia 37, 235–242 (2000). [CrossRef]
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  10. Certain commercial equipment, instruments, or materials are identified in this paper to foster understanding. Such identification does not imply recommendation or endorsement by the National Institute of Standards and Technology, nor does it imply that the materials or equipment identified are necessarily the best available for the purpose.
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