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Applied Optics

Applied Optics


  • Vol. 41, Iss. 34 — Dec. 2, 2002
  • pp: 7300–7308

Influence of substrate absorption on the optical and geometrical characterization of thin dielectric films

Juan-María González-Leal, Rafael Prieto-Alcón, José-Andrés Angel, Dorian A. Minkov, and Emilio Márquez  »View Author Affiliations

Applied Optics, Vol. 41, Issue 34, pp. 7300-7308 (2002)

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The role played by a glass substrate on the accurate determination of the optical constants and the thickness of a thin dielectric film deposited on it, when well-known envelope methods are used, is discussed. Analytical expressions for the two envelopes of the optical transmission spectra corresponding to films with both uniform and nonuniform thicknesses are derived, assuming the substrate to be a weakly absorbing layer. It is shown that accurate determination of the refractive index and the film thickness is notably improved when the absorption of the substrate is considered. The analytical expressions for the upper and lower envelopes are used to characterize optically and geometrically both uniform and nonuniform amorphous chalcogenide films. The results obtained are compared with those derived by use of expressions for the envelopes that neglect the substrate absorption. The comparison shows that overestimated refractive indexes and underestimated thicknesses are obtained when the conventional approach, in which the substrate absorption is neglected, is used.

© 2002 Optical Society of America

OCIS Codes
(120.4530) Instrumentation, measurement, and metrology : Optical constants
(310.6860) Thin films : Thin films, optical properties

Original Manuscript: March 18, 2002
Published: December 1, 2002

Juan-María González-Leal, Rafael Prieto-Alcón, José-Andrés Angel, Dorian A. Minkov, and Emilio Márquez, "Influence of substrate absorption on the optical and geometrical characterization of thin dielectric films," Appl. Opt. 41, 7300-7308 (2002)

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