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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 4 — Feb. 1, 2002
  • pp: 739–746

Evaluation of crystallinity in TiO2 films with mixed structures grown on MgO (001) substrates by argon-ion beam sputtering based on infrared reflection–absorption spectra

Dai Osabe, Hideo Seyama, and Kunisuke Maki  »View Author Affiliations


Applied Optics, Vol. 41, Issue 4, pp. 739-746 (2002)
http://dx.doi.org/10.1364/AO.41.000739


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Abstract

TiO2 films with thicknesses (d) above 15 nm were grown on optically polished surfaces of MgO (001) substrates held at 400 °C by sputtering a Ti target with an argon-ion beam when the partial pressure of O2 was kept at 1.1 × 10-2 Pa. X-ray diffraction patterns show that TiO2 films with d < 56 nm are composed of an a-axis anatase-type structure, whereas those with d > 56 nm are composed of a mixture of phases with the c-axis parallel to the film surface. The thickness dependence of the infrared reflection–absorption spectra shows that TiO2 films with d < 56 nm are composed of both anatase and amorphous phases, whereas those with d > 56 nm are composed of anatase, rutile, and amorphous phases. The crystallinity in TiO2 films is also evaluated from the infrared reflection–absorption spectra by comparison of the observed and the calculated results determined from the dielectric function of anisotropic TiO2 bulk single crystal.

© 2002 Optical Society of America

OCIS Codes
(240.0310) Optics at surfaces : Thin films
(300.6340) Spectroscopy : Spectroscopy, infrared
(310.6860) Thin films : Thin films, optical properties
(310.6870) Thin films : Thin films, other properties

History
Original Manuscript: June 5, 2000
Revised Manuscript: July 10, 2001
Published: February 1, 2002

Citation
Dai Osabe, Hideo Seyama, and Kunisuke Maki, "Evaluation of crystallinity in TiO2 films with mixed structures grown on MgO (001) substrates by argon-ion beam sputtering based on infrared reflection–absorption spectra," Appl. Opt. 41, 739-746 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-4-739


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References

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