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Applied Optics

Applied Optics


  • Vol. 41, Iss. 4 — Feb. 1, 2002
  • pp: 763–767

Efficiency and polarization performance of a multilayer-coated laminar grating in the 6.5–6.9-nm wavelength region

Sadayuki Ishikawa, Takashi Imazono, Tadashi Hatano, Mihiro Yanagihara, and Makoto Watanabe  »View Author Affiliations

Applied Optics, Vol. 41, Issue 4, pp. 763-767 (2002)

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We applied a Mo/B4C multilayer coating to a laminar holographic grating with 2400 grooves/mm and a 1-m radius of curvature. By use of synchrotron soft x rays the multilayer-coated grating was evaluated to have diffraction efficiencies of 3.1% and 0.017% for s- and p-polarized radiation, respectively, at a 6.7-nm wavelength at a 45.35° grazing angle of incidence in the +1 (inside) grating order. Thus the polarizance was estimated to be 98.9% at least. The zero-order peak was suppressed by the destructive interference caused by the groove profile.

© 2002 Optical Society of America

OCIS Codes
(230.1950) Optical devices : Diffraction gratings
(230.4170) Optical devices : Multilayers
(230.5440) Optical devices : Polarization-selective devices

Original Manuscript: February 6, 2001
Revised Manuscript: August 30, 2001
Published: February 1, 2002

Sadayuki Ishikawa, Takashi Imazono, Tadashi Hatano, Mihiro Yanagihara, and Makoto Watanabe, "Efficiency and polarization performance of a multilayer-coated laminar grating in the 6.5–6.9-nm wavelength region," Appl. Opt. 41, 763-767 (2002)

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  1. See, for example, W. R. Hunter, “Multilayer gratings,” in Vacuum Ultraviolet Spectroscopy I, J. A. Samson, D. L. Ederer, eds. (Academic, San Diego, Calif., 1998), pp. 379–399.
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