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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 41, Iss. 7 — Mar. 1, 2002
  • pp: 1315–1322

Low-Coherence Interferometer System for the Simultaneous Measurement of Refractive Index and Thickness

Hideki Maruyama, Shogo Inoue, Teruki Mitsuyama, Masato Ohmi, and Masamitsu Haruna  »View Author Affiliations


Applied Optics, Vol. 41, Issue 7, pp. 1315-1322 (2002)
http://dx.doi.org/10.1364/AO.41.001315


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Abstract

We have developed a low-coherence interferometer system used for the simultaneous measurement of refractive index <i>n</i> and thickness <i>t</i> of transparent plates. Both the phase index <i>n</i><sub><i>p</i></sub> and group index <i>n</i><sub><i>g</i></sub> can be determined automatically in a wide thickness range of from 10 μm to a few millimeters. Two unique techniques are presented to measure <i>n</i><sub><i>p</i></sub>, <i>n</i><sub><i>g</i></sub>, and <i>t</i> simultaneously. One allows us to determine <i>n</i><sub><i>p</i></sub>, <i>n</i><sub><i>g</i></sub>, and <i>t</i> accurately by using a special sample holder, in which the measurement accuracy is 0.3% for the thickness <i>t</i> above 0.1 mm. In the other technique the chromatic dispersion δ<i>n</i> of index is approximately expressed as a function of (<i>n</i><sub><i>p</i></sub> − 1) on the basis of measured values of <i>n</i><sub><i>p</i></sub> and <i>n</i><sub><i>g</i></sub> for a variety of materials, and then the simultaneous measurement is performed with a normal sample holder. In addition, a measurement accuracy of less than 1% is achieved even when the sample is as thin as 20 μm. The measurement time is also 3 min or more.

© 2002 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(120.5710) Instrumentation, measurement, and metrology : Refraction

Citation
Hideki Maruyama, Shogo Inoue, Teruki Mitsuyama, Masato Ohmi, and Masamitsu Haruna, "Low-Coherence Interferometer System for the Simultaneous Measurement of Refractive Index and Thickness," Appl. Opt. 41, 1315-1322 (2002)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-41-7-1315


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References

  1. P. A. Flournoy, R. W. McClure, and G. Wyntjes, “White-light interferometric thickness gauge,” Appl. Opt. 11, 1907–1915 (1972).
  2. B. W. Weinstein, “White-light interferometric measurement of the wall thickness of hollow glass microspheres,” J. Appl. Phys. 46, 5305–5306 (1975).
  3. K. Takada, I. Yokohama, K. Chida, and J. Noda, “New measurement system for fault location in optical waveguide devices based on an interferometric technique,” Appl. Opt. 26, 1603–1606 (1987).
  4. R. C. Youngquist, S. Carr, and D. E. N. Davis, “Optical coherence-domain reflectmetry:a new optical evaluation technique,” Opt. Lett. 12, 158–160 (1987).
  5. H. H. Gilgen, R. P. Novak, R. P. Salathe, W. Hodel, and P. Beaud, “Submillimeter optical reflectmetry,” J. Lightwave Technol. 7, 1225–1233 (1989).
  6. D. Huang, E. A. Swanson, C. P. Lin, J. S. Schuman, W. G. Stinson, W. Chang, M. R. Hee, T. Flotte, K. Gregory, C. A. Puliafito, and J. G. Fujimoto, “Optical coherence tomography,” Science 254, 1178–1181 (1991).
  7. E. A. Swanson, J. A. Izatt, M. R. Hee, D. Huang, C. P. Lin, J. S. Schuman, C. A. Puliafito, and J. G. Fujimoto, “In vivo retinal imaging by optical coherence tomography,” Opt. Lett. 18, 1864–1866 (1993).
  8. G. J. Tearney, M. E. Brezinski, J. F. Southern, B. E. Bouma, M. R. Hee, and J. G. Fujimoto, “Determination of the refractive index of highly scattering human tissue by optical coherence tomography,” Opt. Lett. 20, 2258–2261 (1995).
  9. T. Fukano and I. Yamaguchi, “Simultaneous measurement of thickness and refractive indices of multiple layers by a low-coherence confocal microscope,” Opt. Lett. 21, 1942–1944 (1996).
  10. M. Ohmi, T. Shiraishi, H. Tajiri, and M. Haruna, “Simultaneous measurement of refractive index and thickness of transparent plates by low coherence interferometry,” Opt. Rev. 4, 507–515 (1997).
  11. M. Haruna, M. Ohmi, T. Mitsuyama, H. Tajiri, H. Maruyama, and M. Hashimoto, “Simultaneous measurement of the phase and group indices and thickness of transparent plates by low-coherence interferometry,” Opt. Lett. 23, 966–968 (1998).
  12. H. Maruyama, T. Mitsuyama, M. Ohmi, and M. Haruna, “Simultaneous measurement of refractive index and thickness by low coherence interferometry considering chromatic dispersion of index,” Opt. Rev. 7, 468–472 (2000).
  13. S. Inoue, H. Maruyama, T. Mitsuyama, M. Ohmi, K. Ihara, and M. Haruna, “A low-coherence interferometer system for simultaneous measurement of refractive index and thickness ranging from 20 μm to a few millimeters,” in 13th International Conference on Optical Fiber Sensors, B. Kim and K. Hotate, eds., Proc. SPIE 3746, 26–29 (1999).
  14. H. Maruyama, S. Inoue, M. Ohmi, K. Ihara, S. Nakagawa, and M. Haruna, “A practical measurement system for determination of refractive index and thickness using the low coherence interferometry,” in Proceedings of the International Conference on Optical Engineering for Sensing and Nanotechnology, I. Yamaguchi, ed., Proc. SPIE 3740, 26–29 (1999).
  15. For fused quartz and sapphire, see K. Kudo, Figures and Tables of the Basic Study of Spectroscopy (Kyouritsu-Shuppan, Tokyo, 1972), pp. 190 and 280; for LiNbO3 and LiTaO3, see C. J. G. Kirkby, Properties of Lithium Niobate (Institution of Electrical Engineers, London, 1989), Sec. 5.1; for BaCD14 and FD60 optical glass, see optical glass J9206–1A005D, in the HOYA Catalog (HOYA, Tokyo, 1992).

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