OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 42, Iss. 7 — Mar. 1, 2003
  • pp: 1296–1305

Spectral Interference Mirau Microscope with an Acousto-Optic Tunable Filter for Three-Dimensional Surface Profilometry

Dalip Singh Mehta, Shohei Saito, Hideki Hinosugi, Mitsuo Takeda, and Takashi Kurokawa  »View Author Affiliations


Applied Optics, Vol. 42, Issue 7, pp. 1296-1305 (2003)
http://dx.doi.org/10.1364/AO.42.001296


View Full Text Article

Acrobat PDF (3630 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A nonmechanical scanning Mirau-type spectral interference microscope has been developed for the measurement of three-dimensional surface profiles of discontinuous objects. An acousto-optic tunable filter (AOTF) is used as a high-resolution spectral filter, which scans the optical frequency of the broadband light emitted from a superluminescent diode. To generate spectral fringes that make full use of the limited coherence length of the filtered light we unbalanced the Mirau interferometric system by positioning the reference mirror nearly halfway between the top and the bottom of the step height. When the frequency of the broadband light source is scanned by an AOTF, the interference fringes move in opposite directions on the top and the bottom of the object. To uniquely determine the sign of the fringe movement over the large area of the object, we developed a three-dimensional Fourier-transform technique, and from the detected sign of the fringe movement and phase information, we determined the three-dimensional step height. Experimental results of the measurement of 100-μm step height are presented. The main advantages of the proposed system are that it provides nonmechanical scanning and a large measurement range without ambiguity in the sign of the phase.

© 2003 Optical Society of America

OCIS Codes
(110.0180) Imaging systems : Microscopy
(120.2650) Instrumentation, measurement, and metrology : Fringe analysis
(120.2830) Instrumentation, measurement, and metrology : Height measurements
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.3940) Instrumentation, measurement, and metrology : Metrology

Citation
Dalip Singh Mehta, Shohei Saito, Hideki Hinosugi, Mitsuo Takeda, and Takashi Kurokawa, "Spectral Interference Mirau Microscope with an Acousto-Optic Tunable Filter for Three-Dimensional Surface Profilometry," Appl. Opt. 42, 1296-1305 (2003)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-42-7-1296

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited