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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 13 — May. 1, 2004
  • pp: 2689–2694

Six-Degrees-of-Freedom Alignment Technique that Provides Diagnostic Misalignment Information

Marc Châteauneuf and Andrew G. Kirk  »View Author Affiliations


Applied Optics, Vol. 43, Issue 13, pp. 2689-2694 (2004)
http://dx.doi.org/10.1364/AO.43.002689


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Abstract

We introduce a new six-degrees-of-freedom alignment technique that enables the precise alignment of two optical device planes. The method combines linear diffraction gratings and cylindrical Fresnel lenses that allow the diagnosis of misalignment in each degree of freedom independently. The technique was used to align two 20 mm × 20 mm fused-silica substrates separated by 17 mm. The worst-case alignment precision was found to be better than ±5 μm laterally, ±20 μm longitudinally, ±0.036° rotationally, and ±0.007° in tilt.

© 2004 Optical Society of America

OCIS Codes
(050.1220) Diffraction and gratings : Apertures
(050.1380) Diffraction and gratings : Binary optics
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(350.3950) Other areas of optics : Micro-optics

Citation
Marc Châteauneuf and Andrew G. Kirk, "Six-Degrees-of-Freedom Alignment Technique that Provides Diagnostic Misalignment Information," Appl. Opt. 43, 2689-2694 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-13-2689


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