OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 43, Iss. 13 — May. 1, 2004
  • pp: 2689–2694

Six-degrees-of-freedom alignment technique that provides diagnostic misalignment information

Marc Châteauneuf and Andrew G. Kirk  »View Author Affiliations


Applied Optics, Vol. 43, Issue 13, pp. 2689-2694 (2004)
http://dx.doi.org/10.1364/AO.43.002689


View Full Text Article

Enhanced HTML    Acrobat PDF (985 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

We introduce a new six-degrees-of-freedom alignment technique that enables the precise alignment of two optical device planes. The method combines linear diffraction gratings and cylindrical Fresnel lenses that allow the diagnosis of misalignment in each degree of freedom independently. The technique was used to align two 20 mm × 20 mm fused-silica substrates separated by 17 mm. The worst-case alignment precision was found to be better than ±5 μm laterally, ±20 μm longitudinally, ±0.036° rotationally, and ±0.007° in tilt.

© 2004 Optical Society of America

OCIS Codes
(050.1220) Diffraction and gratings : Apertures
(050.1380) Diffraction and gratings : Binary optics
(050.1950) Diffraction and gratings : Diffraction gratings
(120.4290) Instrumentation, measurement, and metrology : Nondestructive testing
(120.4820) Instrumentation, measurement, and metrology : Optical systems
(350.3950) Other areas of optics : Micro-optics

History
Original Manuscript: October 21, 2003
Published: May 1, 2004

Citation
Marc Châteauneuf and Andrew G. Kirk, "Six-degrees-of-freedom alignment technique that provides diagnostic misalignment information," Appl. Opt. 43, 2689-2694 (2004)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-43-13-2689

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited