Optical properties of scandium films in the far and the extreme ultraviolet

Juan I. Larruquert; José A. Aznárez; José A. Méndez; Andrea Marco Malvezzi; Luca Poletto; Sara Covini

doi:10.1364/AO.43.003271

Applied Optics
Vol. 43,
Issue 16,
pp. 3271-3278
(2004)
•https://doi.org/10.1364/AO.43.003271

Optical properties of scandium films in the far and the extreme ultraviolet

Juan I. Larruquert, José A. Aznárez, José A. Méndez, Andrea Marco Malvezzi, Luca Poletto, and Sara Covini

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Juan I. Larruquert, José A. Aznárez, José A. Méndez, Andrea Marco Malvezzi, Luca Poletto, and Sara Covini, "Optical properties of scandium films in the far and the extreme ultraviolet," Appl. Opt. 43, 3271-3278 (2004)

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Abstract

The optical properties of thin Sc films deposited in ultrahigh-vacuum conditions have been investigated in the 6.7–174.4-nm spectral range. We measured transmittance and multiangle reflectance in situ in the 53.6–174.4 nm spectral range and used these measurements to obtain the complex refractive index of a Sc film at every individual wavelength investigated. Transmittance measurements were made of Sc samples that were deposited over grids coated with a support C film. The transmittance and the extinction coefficient of Sc films at wavelengths shorter than 30 nm were measured ex situ. The ex situ samples were protected with an additional top C film before their removal from vacuum. To our knowledge, these are the first optical measurements of Sc films reported in the spectral ranges cited.

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Wavelength (nm)	k
6.7	0.0027 ± 0.0004
9.2	0.0048 ± 0.0005
11.4	0.0070 ± 0.0005
13.5	0.0093 ± 0.0006
17.30	0.0151 ± 0.0007
17.67	0.0149 ± 0.0004
18.06	0.0190 ± 0.0005
18.23	0.0155 ± 0.0006
18.61	0.0153 ± 0.0005
19.00	0.0167 ± 0.0008
19.58	0.0177 ± 0.0008
19.97	0.0194 ± 0.0016
20.33	0.0198 ± 0.0013
20.89	0.024 ± 0.003
21.32	0.023 ± 0.003
21.51	0.023 ± 0.003
24.67	0.102 ± 0.002
24.74	0.100 ± 0.002
25.00	0.090 ± 0.002
25.30	0.111 ± 0.003
25.74	0.126 ± 0.005
26.17	0.144 ± 0.004
26.52	0.184 ± 0.014
26.78	0.169 ± 0.020
27.23	0.194 ± 0.005
27.68	0.176 ± 0.005
28.14	0.162 ± 0.007
28.59	0.154 ± 0.005
29.06	0.134 ± 0.004
29.52	0.134 ± 0.003

Wavelength (nm)	Optical Constant
Wavelength (nm)	n	k
53.6	0.95 ± 0.02	0.041 ± 0.003
58.4	0.91 ± 0.02	0.052 ± 0.003
67.2	0.84 ± 0.02	0.083 ± 0.003
73.5	0.78 ± 0.02	0.122 ± 0.006
83.4	0.64 ± 0.02	0.295 ± 0.010
92.0	0.56 ± 0.02	0.326 ± 0.015
96.4	0.54 ± 0.02	0.409 ± 0.015
104.8	0.52 ± 0.04	0.54 ± 0.04
106.7	0.55 ± 0.03	0.67 ± 0.04
113.5	0.57 ± 0.03	0.69 ± 0.04
120.0	0.67 ± 0.03	0.82 ± 0.04
124.4	0.71 ± 0.02	0.87 ± 0.04
132.0	0.80 ± 0.06	0.95 ± 0.06
141.2	0.76 ± 0.07	0.91 ± 0.07
149.2	0.81 ± 0.07	1.01 ± 0.05
155.7	0.88 ± 0.07	1.03 ± 0.05
174.4	1.10 ± 0.06	1.15 ± 0.04

λ (nm)	θ (°)	Sample 1				Sample 2
λ (nm)	θ (°)	Fresh	3-day UHV	2 × 10⁵ L	2 × 10⁷ L	Fresh	3-day UHV
104.8	5	0.202	0.193	0.189	0.185
120.0	5	0.244	0.235	0.226	0.212
58.4	5					0.007	0.009
58.4	80					0.582	0.547
104.8	5					0.208	0.190
104.8	80					0.800	0.796

Wavelength (nm)	k
6.7	0.0027 ± 0.0004
9.2	0.0048 ± 0.0005
11.4	0.0070 ± 0.0005
13.5	0.0093 ± 0.0006
17.30	0.0151 ± 0.0007
17.67	0.0149 ± 0.0004
18.06	0.0190 ± 0.0005
18.23	0.0155 ± 0.0006
18.61	0.0153 ± 0.0005
19.00	0.0167 ± 0.0008
19.58	0.0177 ± 0.0008
19.97	0.0194 ± 0.0016
20.33	0.0198 ± 0.0013
20.89	0.024 ± 0.003
21.32	0.023 ± 0.003
21.51	0.023 ± 0.003
24.67	0.102 ± 0.002
24.74	0.100 ± 0.002
25.00	0.090 ± 0.002
25.30	0.111 ± 0.003
25.74	0.126 ± 0.005
26.17	0.144 ± 0.004
26.52	0.184 ± 0.014
26.78	0.169 ± 0.020
27.23	0.194 ± 0.005
27.68	0.176 ± 0.005
28.14	0.162 ± 0.007
28.59	0.154 ± 0.005
29.06	0.134 ± 0.004
29.52	0.134 ± 0.003

Wavelength (nm)	Optical Constant
Wavelength (nm)	n	k
53.6	0.95 ± 0.02	0.041 ± 0.003
58.4	0.91 ± 0.02	0.052 ± 0.003
67.2	0.84 ± 0.02	0.083 ± 0.003
73.5	0.78 ± 0.02	0.122 ± 0.006
83.4	0.64 ± 0.02	0.295 ± 0.010
92.0	0.56 ± 0.02	0.326 ± 0.015
96.4	0.54 ± 0.02	0.409 ± 0.015
104.8	0.52 ± 0.04	0.54 ± 0.04
106.7	0.55 ± 0.03	0.67 ± 0.04
113.5	0.57 ± 0.03	0.69 ± 0.04
120.0	0.67 ± 0.03	0.82 ± 0.04
124.4	0.71 ± 0.02	0.87 ± 0.04
132.0	0.80 ± 0.06	0.95 ± 0.06
141.2	0.76 ± 0.07	0.91 ± 0.07
149.2	0.81 ± 0.07	1.01 ± 0.05
155.7	0.88 ± 0.07	1.03 ± 0.05
174.4	1.10 ± 0.06	1.15 ± 0.04

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Applied Optics