A fast scanning method for one-dimensional surface profile measurement is proposed. The profile is measured by integration of a slope distribution of the surface obtained from angular deflection of a scanning laser beam. A scanning optical system that consists principally of a spherical concave mirror and a rotating scanner mirror has reasonably low cost and is insensitive to mechanical vibration because of its high-speed scanning, of the order of milliseconds. A surface profile of a polygonal mirror along a 5-mm width was measured with the scanning method and with an interferometer. The root-mean-square difference between the two measured results is 0.98 nm.

© 2004 Optical Society of America

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

Related Journal Articles

• Synthesis of Longitudinal Coherence Functions by Spatial Modulation of an Extended Light Source: A New Interpretation and Experimental Verifications (AO)
• Three-Dimensional Optical High-Resolution Profiler with a Large Observation Field: Foot Arch Behavior under Low Static Charge Studies (AO)
• Synthesis of a multiple-peak spatial degree of coherence for imaging through absorbing media (AO)
• High-resolution, real-time 3D absolute coordinate measurement based on a phase-shifting method (OE)
• Method to test rotationally asymmetric surface deviation with high accuracy (AO)

Related Conference Papers

• The optical mouse as an inexpensive measurement device
• Advances in micro-lens surface metrology: The role of retrace errors
• High-Accuracy Form Measurement with Multiple Sensor Systems
• Phase Retardation Design Approach of a Refractive and Diffractive Element for Linearizing Sinusoidal Scanning
• Real-Time 3-D Shape Measurement with High Accuracy and Low Cost