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Applied Optics

Applied Optics


  • Vol. 43, Iss. 25 — Sep. 1, 2004
  • pp: 4821–4830

Signal modeling for low-coherence height-scanning interference microscopy

Peter de Groot and Xavier Colonna de Lega  »View Author Affiliations

Applied Optics, Vol. 43, Issue 25, pp. 4821-4830 (2004)

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We propose a computationally efficient theoretical model for low-coherence interferometric profilers that measure surface heights by scanning the optical path difference of the interferometer. The model incorporates both geometric and spectral effects by means of an incoherent superposition of ray bundles through the interferometer spanning a range of wavelengths, incident angles, and pupil plane coordinates. This superposition sum is efficiently performed in the frequency domain, followed by a Fourier transform to generate the desired simulated interference signal. Example applications include white-light interferometry, high-numerical-aperture microscopy with a near-monochromatic light source, and interference microscopy for thickness and topography analysis of thin-film structures and other complex surface features.

© 2004 Optical Society of America

OCIS Codes
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3940) Instrumentation, measurement, and metrology : Metrology
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure
(150.6910) Machine vision : Three-dimensional sensing

Original Manuscript: January 21, 2004
Revised Manuscript: April 12, 2004
Manuscript Accepted: May 20, 2004
Published: September 1, 2004

Peter de Groot and Xavier Colonna de Lega, "Signal modeling for low-coherence height-scanning interference microscopy," Appl. Opt. 43, 4821-4830 (2004)

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