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Applied Optics

Applied Optics


  • Vol. 44, Iss. 2 — Jan. 10, 2005
  • pp: 249–256

Theoretical analysis and measurement of the temperature dependence of a micromachined Fabry–Perot pressure sensor

Dagang Guo, Weijun Wang, and Rongming Lin  »View Author Affiliations

Applied Optics, Vol. 44, Issue 2, pp. 249-256 (2005)

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In this study an analytical model that takes into account the coupled photoelastic and thermo-optical effects is established to evaluate the temperature dependence of a single-chip silicon micromachined Fabry–Perot pressure sensor. The results show that temperature variation has a significant effect on the performance of a micromachined Fabry–Perot pressure sensor with a conventional flat diaphragm. A new membrane-type silicon micromachined Fabry–Perot pressure sensor with a novel deeply corrugated diaphragm is then proposed. The sensor is fabricated on a single-chip by use of both surface- and bulk-micromachining techniques. Both analytical and experimental results show that the cross sensitivity of Fabry–Perot pressure sensors to temperature can be substantially alleviated by use of the proposed single deeply corrugated diaphragm.

© 2005 Optical Society of America

OCIS Codes
(060.2370) Fiber optics and optical communications : Fiber optics sensors
(120.2230) Instrumentation, measurement, and metrology : Fabry-Perot
(220.4000) Optical design and fabrication : Microstructure fabrication
(220.4880) Optical design and fabrication : Optomechanics
(310.6860) Thin films : Thin films, optical properties

Original Manuscript: October 28, 2003
Revised Manuscript: August 23, 2004
Manuscript Accepted: September 24, 2004
Published: January 10, 2005

Dagang Guo, Weijun Wang, and Rongming Lin, "Theoretical analysis and measurement of the temperature dependence of a micromachined Fabry–Perot pressure sensor," Appl. Opt. 44, 249-256 (2005)

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