OSA's Digital Library

Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 27 — Sep. 20, 2005
  • pp: 5786–5792

Combined Twyman–Green and Mach–Zehnder interferometer for microlens testing

Stephan Reichelt and Hans Zappe  »View Author Affiliations


Applied Optics, Vol. 44, Issue 27, pp. 5786-5792 (2005)
http://dx.doi.org/10.1364/AO.44.005786


View Full Text Article

Enhanced HTML    Acrobat PDF (1496 KB)





Browse Journals / Lookup Meetings

Browse by Journal and Year


   


Lookup Conference Papers

Close Browse Journals / Lookup Meetings

Article Tools

Share
Citations

Abstract

A new interferometer design for microlens testing is presented. The phase-shifting system combines the advantages of a Twyman–Green and a Mach–Zehnder interferometer and permits full characterization of the aberrations of microlenses as well as radius of curvature and focal length measurements. The Twyman–Green system is applied to surface testing in reflection (single reflection), whereas the Mach–Zehnder system is used for lens testing in transmission (single pass). Both measurements are performed without removal of the test part, allowing for combination of the results without confusion of the actual lens and without an azimuthal orientation error. The interferometer setup is explained, the test procedure is described, and experimental results are given.

© 2005 Optical Society of America

OCIS Codes
(120.0120) Instrumentation, measurement, and metrology : Instrumentation, measurement, and metrology
(120.3180) Instrumentation, measurement, and metrology : Interferometry
(120.3930) Instrumentation, measurement, and metrology : Metrological instrumentation
(120.4640) Instrumentation, measurement, and metrology : Optical instruments
(220.4840) Optical design and fabrication : Testing
(350.3950) Other areas of optics : Micro-optics

History
Original Manuscript: January 20, 2005
Revised Manuscript: April 26, 2005
Manuscript Accepted: April 26, 2005
Published: September 20, 2005

Citation
Stephan Reichelt and Hans Zappe, "Combined Twyman–Green and Mach–Zehnder interferometer for microlens testing," Appl. Opt. 44, 5786-5792 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-27-5786

You do not have subscription access to this journal. Citation lists with outbound citation links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Cited by links are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Figure files are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

You do not have subscription access to this journal. Article level metrics are available to subscribers only. You may subscribe either as an OSA member, or as an authorized user of your institution.

Contact your librarian or system administrator
or
Log in to access OSA Member Subscription

« Previous Article  |  Next Article »

OSA is a member of CrossRef.

CrossCheck Deposited