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Applied Optics

Applied Optics

APPLICATIONS-CENTERED RESEARCH IN OPTICS

  • Vol. 44, Iss. 8 — Mar. 10, 2005
  • pp: 1393–1400

Grating projection system for surface contour measurement

Cho Jui Tay, Madhuri Thakur, and Chenggen Quan  »View Author Affiliations


Applied Optics, Vol. 44, Issue 8, pp. 1393-1400 (2005)
http://dx.doi.org/10.1364/AO.44.001393


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Abstract

A grating projection system is a low-cost surface contour measurement technique that can be applied to a wide range of applications. There has been a resurgence of interest in the technique in recent years because of developments in computer hardware and image processing algorithms. We describe a method that projects a phase-shifted grating through a lens on an object surface. The deformed grating image on the object surface is captured by a CCD camera for subsequent analysis. Phase variation is achieved by a linear translation stage on which the grating is mounted. We compare the experimental results with the test results using a mechanical stylus method.

© 2005 Optical Society of America

OCIS Codes
(050.2770) Diffraction and gratings : Gratings
(120.5050) Instrumentation, measurement, and metrology : Phase measurement
(120.6650) Instrumentation, measurement, and metrology : Surface measurements, figure

History
Original Manuscript: June 7, 2004
Revised Manuscript: October 5, 2004
Manuscript Accepted: October 14, 2004
Published: March 10, 2005

Citation
Cho Jui Tay, Madhuri Thakur, and Chenggen Quan, "Grating projection system for surface contour measurement," Appl. Opt. 44, 1393-1400 (2005)
http://www.opticsinfobase.org/ao/abstract.cfm?URI=ao-44-8-1393

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