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Applied Optics

Applied Optics


  • Vol. 44, Iss. 9 — Mar. 21, 2005
  • pp: 1577–1581

Two-wavelength phase-shifting interferometry with a superimposed grating displayed on an electrically addressed spatial light modulator

Youichi Bitou  »View Author Affiliations

Applied Optics, Vol. 44, Issue 9, pp. 1577-1581 (2005)

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A two-wavelength moire phase-shifting interferometer that uses a superimposed grating has been developed. The optical phase shifts for the two wavelengths are given by digital phase shifts of a superimposed grating displayed on a liquid-crystal spatial light modulator. A phase shift of the moire fringe is achieved by equal phase shifts with opposite signs in the two gratings. A moire phase-shifting interferometer with no moving parts and no requirement for calibration of the value of the phase shifts was obtained. Our experimental result shows measurements of the profile of a step object with a 2.65-μm synthetic wavelength.

© 2005 Optical Society of America

Original Manuscript: August 16, 2004
Revised Manuscript: November 10, 2004
Manuscript Accepted: November 11, 2004
Published: March 20, 2005

Youichi Bitou, "Two-wavelength phase-shifting interferometry with a superimposed grating displayed on an electrically addressed spatial light modulator," Appl. Opt. 44, 1577-1581 (2005)

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