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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 14 — May. 10, 2006
  • pp: 3226–3236

Photoconductive optically driven deformable membrane under high-frequency bias: fabrication, characterization, and modeling

B. Haji-saeed, R. Kolluru, D. Pyburn, R. Leon, S. K. Sengupta, M. Testorf, W. Goodhue, J. Khoury, A. Drehman, C. L. Woods, and J. Kierstead  »View Author Affiliations

Applied Optics, Vol. 45, Issue 14, pp. 3226-3236 (2006)

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The fabrication and characterization of an optically addressable deformable mirror for a spatial light modulator are described. Device operation utilizes an electrostatically driven pixelated aluminized polymeric membrane mirror supported above an optically controlled photoconductive GaAs substrate. A 5   μm thick grid of patterned photoresist supports the 2   μm thick aluminized Mylar membrane. A conductive ZnO layer is placed on the backside of the GaAs wafer. Similar devices were also fabricated with InP. A standard Michelson interferometer is used to measure mirror deformation data as a function of illumination, applied voltage, and frequency. The device operates as an impedance distribution between two cascaded impedances of deformable membrane substrate, substrate, and electrode. An analysis of device's operation under several bias conditions, which relates membrane deformation to operating parameters, is presented.

© 2006 Optical Society of America

OCIS Codes
(230.3990) Optical devices : Micro-optical devices
(230.4000) Optical devices : Microstructure fabrication
(230.6120) Optical devices : Spatial light modulators
(250.0250) Optoelectronics : Optoelectronics

Original Manuscript: July 22, 2005
Manuscript Accepted: December 13, 2005

B. Haji-saeed, R. Kolluru, D. Pyburn, R. Leon, S. K. Sengupta, M. Testorf, W. Goodhue, J. Khoury, A. Drehman, C. L. Woods, and J. Kierstead, "Photoconductive optically driven deformable membrane under high-frequency bias: fabrication, characterization, and modeling," Appl. Opt. 45, 3226-3236 (2006)

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