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Applied Optics

Applied Optics


  • Editor: James C. Wyant
  • Vol. 45, Iss. 22 — Aug. 1, 2006
  • pp: 5479–5488

Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope

Gerald E. Jellison, Jr., John D. Hunn, and Christopher M. Rouleau  »View Author Affiliations

Applied Optics, Vol. 45, Issue 22, pp. 5479-5488 (2006)

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A new microscope is described that is capable of measuring the polarization characteristics of materials in normal-incidence reflection with a demonstrated lateral resolution of 4   μm . The instrument measures eight parameters of the sample Mueller matrix, which can be related to the diattenuation, retardation, circular diattenuation, direction of the principal axis, and the polarization factor. With proper calibration, the eight elements of the sample Mueller matrix can be determined to better than 0.001–0.002 for small values. Examples are given for aluminum, rutile ( TiO 2 ) , and calcite ( CaCO 3 ) .

© 2006 Optical Society of America

OCIS Codes
(120.2130) Instrumentation, measurement, and metrology : Ellipsometry and polarimetry
(120.5700) Instrumentation, measurement, and metrology : Reflection
(180.0180) Microscopy : Microscopy
(230.5440) Optical devices : Polarization-selective devices

ToC Category:
Imaging Polarimeters

Original Manuscript: February 15, 2005
Revised Manuscript: May 18, 2005
Manuscript Accepted: May 24, 2005

Virtual Issues
Vol. 1, Iss. 9 Virtual Journal for Biomedical Optics

Gerald E. Jellison Jr., John D. Hunn, and Christopher M. Rouleau, "Normal-incidence generalized ellipsometry using the two-modulator generalized ellipsometry microscope," Appl. Opt. 45, 5479-5488 (2006)

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